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Eurovacuum EVT-series View the EVT-series catalog (pdf) High Performance Turbo molecular pumps Eurovacuum has chosen to deliver Turbo molecular pumps manufactured by KYKY Technology Development Ltd. from Beijing in China, because these pumps are build at world-class quality. To proof there quality these pumps are supplied with a 18 month warranty, the best warranty in the business. These pumps are the ideal solution for applications requiring rugged reliable and proven hardware. Turbomolecular Pumps
Resembling a jet engine, a turbo pump has a stack of rotors, each with multiple, angled blades which drive at very high tangential speed. Gas molecules, hit by the underside of the angled blades, move with momentum in the direction of the higher pressure exhaust. Turbo pumps reach full operating speed within a few minutes of switch-on, making a separate roughing line unnecessary since the accelerating turbo can rough the chamber. A turbo pump's high rotational speeds (for small diameter units operate at 60,000 rpm) put serious strain on the shaft bearings. That is why we offer light-weight ceramic ball bearings with grease or oil lubrication since this combination is both light, lowering the momentum of the bearing, and has a low bearing-lubricant vapor pressure at the pump's working temperature. Applications
Turbomolecular pumps are used in a wide variety of high vacuum applications any that demand clean, truly oil-free vacuum between 10-4 and 10-10 mbar. The single-ended pump is frequently chosen to replace a comparably sized diffusion pump in existing systems. Versions made from materials that withstand chemical attack when pumping corrosive gases find extensive application in semiconductor processing, particularly those using reactive gas plasmas. The initial cost of a turbo pump is higher than a diffusion pump with similar pumping speed. But the turbo pump's lower running costs, and the almost negligible chance that clumsy operation will cause an expensive vacuum disaster, make the turbo pump the first choice for many users. Turbo pumps find applications in following processes: | Applications • Furnaces and plants
• Laser technology
• Medicinal technology
• Metallurgy
• Space simulation
• Vacuum coating
• Semi-conductor
• Data storage
• Solar industry | Advantages to the User • 18 month warranty
• Very good price/quality level
• Instant exchange program available within Europe
• High pumping speed
• Low noise level
• Pumps are supplied with CE certificate
• Wide range of accessories available for easy
adaptation |
Drag stage The drag pump has a extra stage for moving gas through the chamber. In this stage a high speed rotor spins between two closely-spaced, inner- and outer-cylindrical walls with helical grooves facing the rotor. When the rotor's tangential velocity approaches that of the average gas molecule's velocity, momentum transfer causes flow toward the exhaust port. To assist that flow, the spiral grooves on the outer wall have a downward shape while the ones on the inner wall have an upward shape. Use drag pumps in applications requiring clean, low pumping speeds and modest ultimate pressures (10-6 mbar). The drag pump accepts continuous inlet pressures below 0.1 mbar and discharges with a foreline pressure of a few mbar. The latter pressure indicates that diaphragm pumps, not normally suitable for backing high vacuum pumps, could work in some applications with drag pumps. Special pumps for chemical applications When pumping corrosive gases it is needed to use a special design to protect the bearings and the rotor against corrosion. All surfaces that come into contact with the gas are protected with a special coating or are manufactured from special materials, that resist the attacks from corrosive gases. The penetration of corrosives into the motor housing and bearing area is prevented by the admission of an inert gas (sealing gas). For this a special sealing gas valve that admits a defined gas stream into the motor housing is fitted to the turbo pump.  | EVT-620NE-LF
Pump type: Compound/Drag
Inlet flange: 160 ISO-K
Pumping speed: 600 l/s
Rotation speed: 27.000 rpm
Compression N2: 1x109
Compression H2: 6x103
Ultimate vacuum: 6x10-8 mbar
Bearings: Ceramic Oil
More info | EVT-620NE-CF
Pump type: Compound/Drag
Inlet flange: 160 CF
Pumping speed: 600 l/s
Rotation speed: 27.000 rpm
Compression N2: 1x109
Compression H2: 6x103
Ultimate vacuum: 6x10-9 mbar
Bearings: Ceramic Oil
More info |  | EVT-1200NE-LF
Pump type: Compound/Drag
Inlet flange: 200 ISO-K
Pumping speed: 1200 l/s
Rotation speed: 24.000 rpm
Compression N2: 1x109
Compression H2: 1x103
Ultimate vacuum: 6x10-8 mbar
Bearings: Ceramic Oil
More info | EVT-1200E-CF
Pump type: Compound/Drag
Inlet flange: 200 CF
Pumping speed: 1200 l/s
Rotation speed: 24.000 rpm
Compression N2: 1x109
Compression H2: 1x103
Ultimate vacuum: 6x10-9 mbar
Bearings: Ceramic Oil
More info |
Also these products are conform CE-norms, see EC Attestation of Conformity
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