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CDG025D-X3

The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

Benefits

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Wide range power supply
  • 2 setpoints
  • RS232 interface
  • Clean room compliant

Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

Part Number

GetAttachment

Dimensions

tiba39e1 Massbild

Specifications

Type 1000 Torr / 1100 mbar 500 … 10 Torr / mbar 1 Torr / mbar 0.25 Torr 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.2 0.25 0.5
Temperature effect
on zero percent FS/°C 0.005 0.005 0.015 0.02 0.02
on span % of reading / °C 0.01 0.01 0.01 0.03 0.03
Resolution percent FS 0.003 0.003 0.003 0.003 0.003
Pressure, max. kPa (absolute) 400 260 260 130 130
Response time (2) ms 30 30 30 130 130 / 30 (3)
Lowest reading percent FS 0.01 0.01 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5 0.5 0.5
Temperature
Operation (ambient) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
Bakeout at flange (4) °C ≤110 ≤110 ≤110 ≤110 ≤110
Storage °C –40 … +65 –40 … +65 –40 … +65 –40 … +65 –40 … +65
Supply voltage V (dc) +14 … +30 +14 … +30 +14 … +30 +14 … +30 +14 … +30
Power consumption W ≤1 ≤1 ≤1 ≤1 ≤1
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
Degree of protection IP 30 IP 30 IP 30 IP 30 IP 30
Standards
CE conformity EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
Electrical connection D-Sub, 15-pin, male D-Sub, 15-pin, male D-Sub, 15-pin, male D-Sub, 15-pin, male D-Sub, 15-pin, male
Setpoint
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact V(dc) 30 30 30 30 30
Hysteresis percent FS 1 1 1 1 1
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Internal volume
I. volume 1/2” tube cm³ (in.³) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22)
I. volume DN 16 ISO KF cm³ (in.³) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22)
I. volume DN 16 CF-R cm³ (in.³) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22)
I. volume 8 VCR® cm³ (in.³) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22) 3.6 (0.22)
Weight
Weight 1/2” tube g 310 310 310 310 310
Weight DN 16 ISO KF g 330 330 330 330 330
Weight DN 16 CF-R g 350 350 350 350 350
Weight 8 VCR® g 370 370 370 370 370
(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 10 … 90 percent FS (3) For pressure control type only (4) Non operation (5) 18% Cr, 10% Ni, 3% Mo, 69% Fe
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