PEG100
Medium to Ultra-High Vacuum Gauge
The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.
Benefits
- Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
- All-metal cold cathode sensor (Penning) with ceramic feedthrough
- Innovative electrode geometry provides excellent ignition properties
- Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
- The anode ring and the titanium cathode can be cleaned or replaced easily
- Minimal magnetic field intensity adjacent to gauge
- LED indicator for power on and plasma ignited
- Logarithmic analog output signal
- Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications
Typical Applications
- High vacuum pressure monitoring
- Evaporation and sputtering systems
- General vacuum measurement and control in the fine and high vacuum range
Part Number
| 351-000 | PEG100 DN 25 ISO-KF |
|---|---|
| 351-002 | PEG100 DN 40 CF-F |
| 351-003 | PEG100-D DNet, DN 25 ISO-KF |
| 351-004 | PEG100-D DNet, DN 40 CF-F |
| 351-005 | PEG100-P PBus, DN 25 ISO-KF |
Dimensions
Specifications
| Type | PEG100 | |
|---|---|---|
| Measurement range | mbar | 1 x 10-9 to 1 x 10-2 |
| Accuracy | ||
| 10-8 to 10-4 mbar | % of reading | ±30 |
| Pressure, max. (absolute) | bar | 10 |
| Temperature | ||
| Operation (ambient) | °C | +10 to +50 |
| Storage | °C | -20 to +75 |
| Bakeout without electronics | °C | 350 |
| Bakeout with electronics, at flange | °C | 70 |
| Supply | ||
| Voltage | V (dc) | 14.5 to 36 |
| Consumption, max. | W | <2 |
| Output signal analog | ||
| Output signal | V | 0 to 10.6 |
| Measurement range | V | 0.66 to 10 |
| Relation voltage / pressure | volts per decade | 1.333 |
| Connector | FCC 68, female, 8 pin (shielded) | |
| Cable length, max (analog) | m (ft.) | 100 (330) |
| Materials exposed to vacuum | Stainless steel, CrNi, AI2O3, NiFe, Mo, Cu, Ni, Ti | |
| Internal volume | cm³ (in.³) | 21 (1.28) |
| Weight, approx. | g | 500 |
| Protection type | IP40 | |
| DeviceNet™ | ||
| Device type | generic | |
| Explicit peer to peer messaging | no | |
| I / O peer to peer messaging | no | |
| Configuration consistency value | no | |
| Faulted node recovery | no | |
| Baud rates | kBaud | 125 / 250 / 500 |
| Master / Scanner | no | |
| I / 0 slave messaging: Bit Strobe | yes | |
| I / 0 slave messaging: Polling | yes | |
| I / 0 slave messaging: Cyclic | yes | |
| I / 0 slave messaging: Change of State (COS) | yes | |
| Supply for DeviceNet™ | V (dc) | 11 to 25 |
| Connector for DeviceNet™ | Phoenix Combicon, 5 pin | |
| Profibus DP | ||
| Supported baud rates (auto detection) | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 / 1500 |
| Expanded user parameter data | byte | 5 |
| Configuring: Number of input and output data | 2 | |
| Sync-Mode and Freeze-Mode | Yes | |
| Connector for Profibus | D-sub, 9 pin | |
Spare Parts
| Part Number | Description |
|---|---|
| 351-490 | Spare Cathode Plate, set of 5 pcs |