CDG045Dhs
INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.
Stripe CDG045Dhs is a proud winner of the prestigious 2014 R&D 100 Award!
Benefits
- High productivity – Faster than 1ms response time
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90ppm/year full scale stability
Typical Applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
Dimensions
Specifications
| Type | 1000Torr / 1100mbar … 0.05Torr / mbar | 0.02 … 0.01Torr / mbar | |
|---|---|---|---|
| Accuracy (1) | % of reading | 0.15 | – |
| Precision | % of reading | – | 0.2 |
| Temperature effect | |||
| on zero 1000 … 1 Torr/mbar | percent FS/°C | 0.0025 | – |
| on zero 0.5 … 0.05 Torr/mbar | percent FS/°C | 0.005 | – |
| on zero 0.02 … 0.01 Torr | percent FS/°C | – | 0.01 |
| on span | % of reading / °C | 0.01 | 0.01 |
| Pressure max | |||
| P max 1000Torr / mbar | kPa (absolute) | 400 | 400 |
| P max 500 … 1Torr / mbar | kPa (absolute) | 260 | 260 |
| P max 0.5 … 0.01Torr / mbar | kPa (absolute) | 130 | 130 |
| Resolution | percent FS | 0.003 | 0.003 |
| Lowest reading | percent FS | 0.01 | 0.01 |
| Lowest suggested reading | percent FS | 0.05 | 0.05 |
| Lowest suggested control pressure | percent FS | 0.5 | 0.5 |
| Temperature | |||
| Operation (ambient) | °C | +10 … +40 | +10 … +40 |
| Bakeout at flange | °C | ≤110 | ≤110 |
| Storage | °C | –20 … +85 | –20 … +85 |
| Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| Power consumption | |||
| During Heat up | W | ≤14 | ≤14 |
| At operating temperature | W | ≤9 | ≤9 |
| Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 |
| Response time (2) | ms | 2 | 2 |
| Degree of protection | IP 30 | IP 30 | |
| Standards | |||
| CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
| ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| SEMI compliance | SEMI S2 | SEMI S2 | |
| Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| Setpoint | |||
| Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| Relay contact | V (dc) | ≤30 | ≤30 |
| Hysteresis | percent FS | 1 | 1 |
| Diagnostic port | |||
| Protocol | USB | USB | |
| Read | pressure, status, ID | pressure, status, ID | |
| Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| Internal volume | |||
| I. volume 1/2” tube | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| Weight | |||
| Weight 1/2” tube | g | 837 | 837 |
| Weight DN 16 ISO KF | g | 852 | 852 |
| Weight DN 16 CF-R | g | 875 | 875 |
| Weight 8 VCR® | g | 897 | 897 |
| EtherCAT | |||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | |
| Node address | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| Digital functions read | pressure, status, ID | pressure, status, ID | |
| Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) |