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Residual Gas Analyzers (RGAs) have been used in vacuum research applications for more then 25 years. Their role has changed in the last years, as they have evolved from purely a research instrument to a production tool. As a production tool, the RGA can increase productivity, improve product yield, increase throughput and reduce costs, all of which ultimately increases profits. However, it is up to the user to determine how the tool can best meet the needs of a specific application.

A residual gas analyzer measures the individual partial pressures of gases in a mixture. The RGA system includes a sensor, which operates under high vacuum, the electronics, which operate the sensor, and software, working in conjunction with an external computer to display data and control the electronics.