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CDG025D2

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

 

Benefits

  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications

  • Etch, PVD and other semiconductor production processes
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

Dimensions

Specifications

Type 1000 Torr, 1100 mbar 500 … 10 Torr / mbar 1 Torr / mbar 0.25 Torr / mbar 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.2 0.25 0.5
Temperature effect
on zero % of FS/°C 0.005 0.005 0.015 0.02 0.02
on span % of reading/°C 0.01 0.01 0.01 0.03 0.03
Pressure, max. kPa (abs) 400 260 260 130 130
Resolution % FS 0.003
Lowest reading % FS 0.01
Lowest suggested reading % FS 0.05
Lowest suggested control pressure % FS 0.5
Temperature
Sensor °C 25
Operation (ambient) °C +5 … +50
Bakeout at flange (4) °C ≤110
Storage °C –20 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%)
Power consumption
At operating temperature W ≤1
Output signal (analog) V (dc) 0 … +10
Response time (2) ms 30 30 30 130 130/30 (3)
Degree of protection IP 40
Standards
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2
Electrical connection D-sub, 15 pole, male
Setpoint
Number of setpoints 2 (SP1,SP2)
Relay contact V(dc)/A(dc) ≤30 / ≤0.5
Hysteresis % FS 1 1 1 1 1
Diagnostic port
Protocol RS232-C
Read pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset
Mat. exposed to vacuum Aluminum oxide ceramic (AI2O3), Inox (AISI 316L (5))
Internal volume
I. volume 1/2” tube cm³ (in.³) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26)
Weight
Weight 1/2” tube g 837
Weight DN 16 ISO KF g 852
Weight DN 16 CF-R g 875
Weight 8 VCR® g 897
EtherCAT
Protocol EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Data rate Kbps 100.000
Node address Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330)

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS

(3) For pressure control type only

(4) Non operation

(5) 18% Cr, 10% Ni, 3% Mo, 69% Fe

Brochures

  1. Edge_Web

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