EVT-FJ-080E
EVT series Turbo Molecular Vacuum Pumps systems
Eurovacuum is the designated sales and service point for Turbo molecular pumps manufactured by KYKY Technology Development Ltd. from Beijing in China. These pumps are build for excellent quality. To proof there quality these pumps are supplied with a 18 month warranty, the best standard warranty in the business. The pumps are the ideal solution for applications requiring rugged reliable and proven hardware, due to this the they are oftenly used in applications like:
- Laboratory science
- Mass spectrometry
- Surface analysis
- Sputtering
- Evaporation systems
They are having the following advantage to the users:
- 18 month warranty
- High ultimate vacuum and pumping high gas throughput
- Oil-free versions available with diaphragm pump
- One-key smart start with adjustable time delays
Part Number
Ordering information | Art.No. |
---|---|
Turbo system type EVT-FJ-80E Oil; DN 63 ISO-K | 890080 |
Turbo system type EVT-FJ-80E Oil; DN 63 CF | 890081 |
Turbo system type EVT-FJ-80E Dry; DN 63 ISO-K | 890082 |
Turbo system type EVT-FJ-80E Dry; DN 63 CF | 890083 |
Specifications
Specification | Unit | Dry version | Oil version |
---|---|---|---|
Turbo pump type | Compound/Drag | Compound/Drag | |
Inlet Flange | DN 63 ISO-K/CF | DN 63 ISO-K/CF | |
Pumping speed (N2) | l/s | 62 | 62 |
Pumping speed (He) | l/s | 55 | 55 |
Gas throughput, max. (N2/He) | Sccm | 100/80 | 100/80 |
Inlet pressure, max. | Pa | 10 | 10 |
Ultimate vacuum ISO-K flange | mbar | <3,5x10E-8 | <3,5x10E-8 |
Ultimate Vacuum CF-flange | mbar | < 5x10E-9 | < 5x10E-9 |
Bypass flange (Quick connection) | ø10 | ø10 | |
Exhaust flange (Quick connection) | ø8 | ø8 | |
Venting flange (Quick connection) | ø8 | ø8 | |
Rotation speed | rpm | 72000 | 72000 |
TMP run-up time | min | <1,8 | <1,8 |
Fore-vacuum pump | Diaphragm pump | Oil-sealed pump | |
Pumping speed fore-vacuum pump | L/s | 0,2 | 0,5 |
Ultimate vacuum fore-vacuum pump | Pa | 300 | 0,67 |
Cooling methode | Air | Air | |
Bake-out temperature | °C | <100 | <100 |
Noise level | dB(A) | <55 | <55 |
Permissible magnetic field ma. | mT | <3 | <3 |
Main supply | VAC | 200-240 | 200-240 |
Weight | kg | 16 | 21 |