PPG570
ATM to Medium Vacuum Gauge + ATM Switch
The new INFICON Pirani Piezo combination gauge (PPG570) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available, which is also used in our PPG550 “ATM to Medium Vacuum” Gauge.
What differentiate PPG570 from PPG550 is the additional installed ATM sensor that allows the use of PPG570 in classical Load-lock applications. For example in Semi-Conductor industries or any other vacuum applications where accurate pressure measurement relative to atmospheric ambient pressure is important.
The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.
In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 … 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.
Last but not least the new INFICON PPG570 can be used to direct drop in replace the so called MKS Instruments MKS901P “MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducer”. PPG570 offes same connectors/ pin assignment, analog output and RS232/485 digital communication protocol compatibility.
Benefits
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical Applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
Part Number
Dimensions
Specifications
| Type | PPG570 MEMS | |
|---|---|---|
| Measuring principle | ||
| Pressure range | mbar | 2 … 1333 MEMS Piezo resistive diaphragm
1.5 … 2 Crossover range 1×10-6 … 1.5 MEMS Pirani thermal conductivity |
| Measuring range | ||
| Range (N2) | mbar | 1×10-6 … 1333 |
| Accuracy | ||
| 1100 … 1333 mbar | % of reading | 0.5 |
| 800 … 1099 mbar | % of reading | 0.25 |
| 100 … 800 mbar | % of reading | 0.5 |
| 2 … 99.9 mbar | % of reading | 1 |
| 1 x 10-4 … 1.99 mbar | % of reading | 5 |
| 1 x 10-5 … 9.99 x 10-5 mbar | % of reading | 25 |
| Hysteresis | ||
| 10 … 1333 | % of reading | 0.1 |
| 1 x 10-3 … 10 mbar | % of reading | 1 |
| Barometric measurement range | mbar | 300 … 1200 |
| Barometric accuracy | mbar | +0.5 |
| Atmospheric referenced pressure output range | mbar | -1333 … +1333 |
| Vacuum temperature sensor range | °C | -20 … +85 |
| Vacuum temperature sensor accuracy | °C | +1.5 |
| Transducer temperature sensor range | °C | -20 … +85 |
| Transducer temperature sensor accuracy | °C | +1.5 |
| Analog output resolution | bit | 16 (150 microvolt) |
| Analog output update rate | Hz | 124 |
| Response time (ISO 19685:2017) | ms | <20 |
| Temperature compensation | °C | +10 … +50 |
| Temperature measurement range | °C | -40 … +80 |
| Temperature measurement absolute accuracy | °C | +1.5 (0 … +80) |
| Gas type dependence | Please look operating manual page 13 | |
| Solid state relay | ||
| Set point range (absolute) | mbar | 5 x 10-6 … 1333 mbar |
| Set point range (atm. relative) | mbar | -1100 … +500 |
| Contact rating | 50 | |
| Contact on resistance | Ω | <35 |
| Contact endurance | Contact endurance | Unlimited (no mechanical wear) |
| Analog output | ||
| 3PPM-xxx-xxx0 | V | 0.61 … 10.2 |
| 3PPM-xxx-xxx2 | V | 0.375 … 5.570 |
| 3PPM-xxx-xxx3 | V | 1.0 … 9 |
| 3PPM-xxx-xxxZ | V | no analog signal |
| Error signal | V | please check operating manual page 13 |
| Power supply | ||
| Supply voltage at thegauge | V (dc) | +12 … +30
ripple max. 1 Vpp |
| Power consumption | W | <3.5 |
| Internal fuse | mA | 100 (thermal recoverable) |
| Reverse polarity and overvoltage protection | Reverse polarity and overvoltage protection | yes |
| Sensor cable connection | ||
| 3PPM-0xx-x0xx | IP40 | FCC 68, 8-pin |
| 3PPM-0xx-xDxx | IP40 | D-Sub, 9-pin, male |
| 3PPM-0xx-xExx | IP40 | D-Sub HD, 15-pin, male |
| Sensor cable, shielded | mm | 0.14/ conductor |
| Cable lenght, analog operation | m | <100 |
| Cable lenght, RS232 operation | m | <15 |
| Cable lenght, RS485 operation | m | <1200 |
| RS232C/ RS485 interface | ||
| Data rate | baud | 9600 (default) |
| Data format | bit | binary
8 data bits one stop bit no parity bit no handshake For further information please check out operating Manual page 15 |
| Materials exposed to vacuum | ||
| Housing | Housing | SS 1.4307, AISI 304L, AL 6061 |
| Flange | Flange | SS 1.4307, AISI 304L |
| Further parts | Further parts | AISI 304L, Kovar, glass, Silicon, nickel, AL, SiO2, Si3N4, gold, FPM, low outgassng epoxy resin, solder, RO4305 |
| Pressure max. | mbar | 10 (absolute) |
| Admissible temperatures (ambiance) | ||
| Storage | °C | -40 … +20 |
| Operation | °C | -20 … +50 |
| Bakeout | °C | +120 (non operating) |
| Relative humidity (IEC 68-2-38) (year`s mean/ during 60 days) | % | 98 (non condensing) |
| Use | m | Indoors only
altidude up to 2000 |
| Mounting orientation | any | |
| Protection class | IP40 | Degree of protection |