Rotary/Linear Motion Feedthrough
Eurovacuum’s huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.
BENEFITS
- Two FPM shaft seals
- Direct push/pull and rotary actuation
- With locking ring and optional anti-rotation device
- 2011/65/EU RoHS compliant
Part number
| Type | Part number | |
|---|---|---|
| FCH016-H Rotary/linear motion feedthrough | FCH016-H | 214-320 |
| FCH025-H Rotary/linear motion feedthrough | FCH025-H | 214-322 |
| FCH040-H Rotary/linear motion feedthrough | FCH040-H | 214-324 |
| Sliding feedthrough DN 16 | FCH016-H | 214-072 |
| Sliding feedthrough DN 25 | FCH025-H | 214-073 |
| Sliding feedthrough DN 40 | FCH040-H | 214-074 |
Specifications
| FCH016-H |
FCH025-H
|
FCH040-H | ||
| Vacuum connection | DN16 ISO-KF | DN25 ISO-KF | DN40 ISO-KF | |
| Feedthrough/seal | FPM | FPM | FPM | |
| Shaft connection | M3/Ø5mm | M4/Ø8mm | M6/Ø12mm | |
| Travel | mm | 50 | 100 | 150 |
| Shaft load | ||||
| Radial force at max. travel | N | 10 | 15 | 30 |
| Torsion torque | Nm | 2 | 8 | 20 |
| Tightness, static | mbar•l/s | 1 x 10-9 | 1 x 10-9 | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar…1bar | 1 x 10-8 mbar…1bar | 1 x 10-8 mbar…1bar | |
| Operating temperature | °C | 50 | 50 | 50 |
| Bakeout temperature | °C | 110 | 110 | 110 |
| Materials exposed to process media |
stainless steel 304/1.4301, aluminum 6082 |
stainless steel 304/1.4301, aluminum 6082 |
stainless steel 304/1.4301, aluminum 6082 |
|
| Weight | kg | 0.1 | 0.2 | 0.3 |