BAG402
Medium to Ultra-High Vacuum Gauge
The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.
Benefits
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical Applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Part Number
| Part Number | Description |
|---|---|
| 353-600 | BAG402 DSUB9 KF25 |
| 353-601 | BAG402 DSUB9 CF40 |
Dimensions
Specifications
| Type | BAG402 | |
|---|---|---|
| Measurement range (air, O2, CO, N2) | mbar | 5×10-10 … 2.7×10-2 |
| Accuracy | ||
| 10-8 … 10-2 mbar | % of reading | ±15 |
| Repeatability | ||
| 10-8 … 10-2 mbar | % of reading | 5 |
| Degas (1) | ||
| p < 7.2 × 10-6 | mbar | electron bombardment, max. 3 min |
| Pressure, max. | bar (absolute) | 2 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange without electronics BPG402-S | °C | 80 |
| Supply voltage | +20 … +28 | |
| Output signal analog (4) | ||
| Output signal | V | 0 … +10 |
| Measurement range log / lin | V | 0 … +9 |
| Voltage vs. pressure | volts per decade | 1 |
| Error signal | V | > +10 |
| Load impedance, min. | kΩ | 10 |
| Secondary analog output | none | |
| Setpoint relay | ||
| Number of setpoints | none | |
| Range | ||
| Relay contact | ||
| Hysteresis | ||
| Contact rating | ||
| Digital functions | degas and emission | |
| Interface (digital) (2) | Diagnosis port | |
| Emission control | manual | |
| Filament | two Yttriumoxid (Y2O3) coated Iridium (Ir) | |
| Filament status / relay | LED / relay | |
| Electrical connection | D-Sub, 9-pin, male | |
| Cable length, max. | m (ft.) | 100 (330) |
| Materials exposed to vacuum | Y2O3, Ir, Pt, Mo, NiFe, NiCr, stainless steel, glass | |
| Internal volume KF / CF | cm³ (in.³) | 24 (1.46) / 34 (2.1) |
| Weight KF / CF | g | 450 / 710 |
| Degree of protection | IP30 | |
1) Reduced accuracy during degas
2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed
Accessories
| Part Number | Description |
|---|---|
| 303-333 | Diagnostic cable 1.9m (P3) |
Spare Parts
| Part Number | Description |
|---|---|
| 354-484 | Spare sensor head BAG402 DN 25 ISO-KF |
| 354-485 | Spare sensor head BAG402 DN 40 CF-R |