BCG450
ATM to Ultra-High Vacuum Triple-Gauge™
The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (Triple-Gauge™), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
Benefits
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical Applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Part Numbers
| 353-550 | BCG450 DN 25 ISO-KF |
|---|---|
| 353-561 | BCG450 TripleGauge; DN 25 ISO-KF; Baffle |
| 353-551 | BCG450 DN 40 CF-R |
| 353-552 | BCG450 LCD, DN 25 ISO-KF |
| 353-553 | BCG450 LCD, DN 40 CF-R |
| 353-554 | BCG450-SP PBus, DN 25 ISO-KF |
| 353-556 | BCG450-SP PBus, DN 40 CF-R |
| 353-557 | BCG450-SD DNet, DN 25 ISO-KF |
| 353-558 | BCG450-SD DNet, DN 40 CF-R |
| 353-592 | BCG450-SE ECAT, DN 25 ISO-KF |
| 353-593 | BCG450-SE ECAT, DN 40 CF-R |
Dimensions
Specifications
| Type | BCG450 | |
|---|---|---|
| Measurement range | mbar | 5×10-10 … 1500 |
| Accuracy | ||
| 10-8 … 50 mbar | % of reading | ±15 |
| 50 … 950 mbar | % of reading | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 |
| Repeatability | ||
| 10-8 … 10-2 mbar | % of reading | 5 |
| Hot ion emission on | mbar | 2×10-2 (high) |
| (selectable high / low, via RS232 / Fieldbus) | mbar | 8×10-3 (low) |
| Degas (1) | ||
| p < 7.2 × 10-6 | mbar | electron bombardment, max. 3 min |
| Pressure, max. | bar (absolute) | 5 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange | °C | 80 |
| Bakeout electronics removed | °C | 150 |
| Supply voltage | V (dc) | 20 … 28 |
| Output signal analog | ||
| Output signal | V | 0 … 10.3 |
| Measurement range output | V | 0.774 … 10.3 |
| Relation voltage / pressure | volts per decade | 0.75 |
| Error signal | V | 0.3 / 0.5 |
| Minimum load | kΩ | 10 |
| Interface (digital) (2) | RS232C | |
| Connector | D-Sub, 15-pin, male | |
| Cable length, max. (3) | m (ft.) | 100 (330) |
| Materials exposed to vacuum | Yt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass | |
| Internal volume KF / CF | cm³ (in.³) | 24 (1.46) / 34 (2.1) |
| Weight KF / CF | g | 285 / 550 |
| Degree of protection | IP30 | |
| DeviceNet™ | ||
| Protocol | DeviceNet™, group 2 slave only | |
| Data rate switch | kBaud | 125, 250, 500 or network programmable |
| Cable length 125 kbps | m (ft.) | 500 (1650) |
| Cable length 250 kbps | m (ft.) | 250 (825) |
| Cable length 500 kbps | m (ft.) | 100 (330) |
| MAC ID | 2 switches (address 00 – 63) or network programmable | |
| Network size | up to 64 nodes per segment | |
| Digital functions | read pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |
| Analog functions | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |
| Visual communication indicators | LED network status (green / red) ; LED module status (green / red) | |
| Specification | DeviceNet™ “Vacuum Gauge Device Profile” | |
| Device type | ”CG” for combination gauge | |
| I / O slave messaging | polling only | |
| Setpoint relays: Number of setpoints | 2 | |
| Setpoint relays: Range | mbar | 1×10-9 … 1400 |
| Setpoint relays: Relay contact | n.o., potential free | |
| Setpoint relays: Hysteresis | % of reading | 10 |
| Setpoint relays: Contact rating | V (dc) | 60 |
| Setpoint relays: Connector | D-Sub, 15-pin, male | |
| Supply voltage for DeviceNet™ | V (dc) | 11 … 25 |
| Supply voltage for gauge | V (dc) | 20 … 28 |
| Connector for DeviceNet™ | Microstyle, 5-pin | |
| Connector for BCG (analog output, supply voltage, setpoints) | D-Sub, 15-pin, male | |
| Profibus DP | ||
| Baud rates | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address | 2 switches (address 00 – 127) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |
| Analog functions | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |
| Setpoint relays: Number of setpoints | 2 | |
| Setpoint relays: Range | mbar | 1×10-9 … 1400 |
| Setpoint relays: Relay contact | n.o., potential free | |
| Setpoint relays: Hysteresis | % of reading | 10 |
| Setpoint relays: Contact rating | V (dc) | 60 |
| Connector for Profibus DP | D-Sub, 9-pin, female | |
| Connector for BCG (analog output, supply voltage, setpoints) | D-Sub, 15-pin, male | |
| EtherCAT | ||
| Protocol EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | |
| Digital functions EtherCAT | read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information | |
| Process data | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) |
(1) Reduced accuracy during degas
(2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed
(3) For RS232C operation <30m