your best partner for vacuum

BCG450

ATM to Ultra-High Vacuum Triple-Gauge™

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (Triple-Gauge™), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Benefits

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

Typical Applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

Part Numbers

353-550 BCG450 DN 25 ISO-KF
353-561 BCG450 TripleGauge; DN 25 ISO-KF; Baffle
353-551 BCG450 DN 40 CF-R
353-552 BCG450 LCD, DN 25 ISO-KF
353-553 BCG450 LCD, DN 40 CF-R
353-554 BCG450-SP PBus, DN 25 ISO-KF
353-556 BCG450-SP PBus, DN 40 CF-R
353-557 BCG450-SD DNet, DN 25 ISO-KF
353-558 BCG450-SD DNet, DN 40 CF-R
353-592 BCG450-SE ECAT, DN 25 ISO-KF
353-593 BCG450-SE ECAT, DN 40 CF-R

Dimensions

dimensions

Specifications

Type BCG450
Measurement range mbar 5×10-10 … 1500
Accuracy
10-8 … 50 mbar % of reading ±15
50 … 950 mbar % of reading ±5
950 … 1050 mbar % of reading ±2.5
Repeatability
10-8 … 10-2 mbar % of reading 5
Hot ion emission on mbar 2×10-2 (high)
(selectable high / low, via RS232 / Fieldbus) mbar 8×10-3 (low)
Degas (1)
p < 7.2 × 10-6 mbar electron bombardment, max. 3 min
Pressure, max. bar (absolute) 5
Temperature
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange °C 80
Bakeout electronics removed °C 150
Supply voltage V (dc) 20 … 28
Output signal analog
Output signal V 0 … 10.3
Measurement range output V 0.774 … 10.3
Relation voltage / pressure volts per decade 0.75
Error signal V 0.3 / 0.5
Minimum load kΩ 10
Interface (digital) (2) RS232C
Connector D-Sub, 15-pin, male
Cable length, max. (3) m (ft.) 100 (330)
Materials exposed to vacuum Yt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)
Weight KF / CF g 285 / 550
Degree of protection IP30
DeviceNet™
Protocol DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825)
Cable length 500 kbps m (ft.) 100 (330)
MAC ID 2 switches (address 00 – 63) or network programmable
Network size up to 64 nodes per segment
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Visual communication indicators LED network status (green / red) ; LED module status (green / red)
Specification DeviceNet™ “Vacuum Gauge Device Profile”
Device type ”CG” for combination gauge
I / O slave messaging polling only
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 1400
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating V (dc) 60
Setpoint relays: Connector D-Sub, 15-pin, male
Supply voltage for DeviceNet™ V (dc) 11 … 25
Supply voltage for gauge V (dc) 20 … 28
Connector for DeviceNet™ Microstyle, 5-pin
Connector for BCG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
Profibus DP
Baud rates  kBaud 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 – 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 1400
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating V (dc) 60
Connector for Profibus DP D-Sub, 9-pin, female
Connector for BCG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
EtherCAT
Protocol EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge”
Node address Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3)
Digital functions EtherCAT read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information
Process data Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330)

(1) Reduced accuracy during degas

(2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed

(3) For RS232C operation <30m

3D Step Files

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