CDG045D2
INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind.
Benefits
- Compact, saves valuable tool space
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical Applications
CVD, Etch, PVD and other semiconductor production processes
Dimensions
Specifications
| Type | 1000 Torr, 1100 mbar | 500 … 1 Torr / mbar | |
|---|---|---|---|
| Accuracy (1) | % of reading | 0.15 | 0.15 |
| Temperature effect | |||
| on zero | percent FS/°C | 0.0025 | 0.0025 |
| on span | % of reading / °C | 0.01 | 0.01 |
| Pressure, max. | kPa (absolute) | 400 | 260 |
| Resolution | percent FS | 0.003 | 0.003 |
| Lowest reading | percent FS | 0.01 | 0.01 |
| Lowest suggested reading | percent FS | 0.05 | 0.05 |
| Lowest suggested control pressure | percent FS | 0.5 | 0.5 |
| Temperature | |||
| Sensor | °C | 45 | 45 |
| Operation (ambient) | °C | +10 … +40 | +10 … +40 |
| Bakeout at flange | °C | ≤110 | ≤110 |
| Storage | °C | –20 … +65 | –20 … +65 |
| Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| Power consumption | |||
| During Heat up | W | ≤12 | ≤12 |
| At operating temperature | W | ≤8 | ≤8 |
| Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 |
| Response time (2) | ms | 30 | 30 |
| Degree of protection | IP 40 | IP 40 | |
| Standards | |||
| CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
| ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| SEMI compliance | SEMI S2 | SEMI S2 | |
| Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| Setpoint | |||
| Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| Relay contact | V(dc) | ≤30 | ≤30 |
| Hysteresis | percent FS | 1 | 1 |
| Diagnostic port | |||
| Protocol | RS232-C | RS232-C | |
| Read | pressure, status, ID | pressure, status, ID | |
| Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| Internal volume | |||
| I. volume 1/2” tube | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| Weight | |||
| Weight 1/2” tube | g | 837 | 837 |
| Weight DN 16 ISO KF | g | 852 | 852 |
| Weight DN 16 CF-R | g | 875 | 875 |
| Weight 8 VCR® | g | 897 | 897 |
| EtherCAT | |||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Data rate | Kbps | 100000 | 100000 |
| Node address | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| Digital functions read | pressure, status, ID | pressure, status, ID | |
| Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) |
(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 10 … 90 percent FS (3) For pressure control type only (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe