CDG100Dhs
INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 1 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.
Benefits
- High productivity – Faster than 1ms response time
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90ppm/year full scale stability
Typical Applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
![Stripe100_PN[1]](https://eurovacuum.eu/app/uploads/2016/01/Stripe100_PN1.png)
Dimensions
![Stripe_MB[2]](https://eurovacuum.eu/app/uploads/2016/01/Stripe_MB2.gif)
Specifications
| Type | 1000 … 500 Torr / mbar | 200 … 1 Torr / mbar | 0.5 … 0.1 Torr / mbar | |
|---|---|---|---|---|
| Accuracy (1) | % of reading | 0.2 | 0.2 | 0.4 |
| Temperature effect | ||||
| on zero | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| on span | % of reading / °C | 0.02 | 0.02 | 0.02 |
| Pressure, max. | kPa (absolute) | 400 | 260 | 130 |
| Resolution | percent FS | 0.003 | 0.003 | 0.003 |
| Lowest reading | percent FS | 0.01 | 0.01 | 0.01 |
| Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 |
| Lowest suggested control pressure | percent FS | 0.5 | 0.5 | 0.5 |
| Temperature | ||||
| Operation (ambient) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| Bakeout at flange | °C | ≤110 | ≤110 | ≤110 |
| Storage | °C | –20 … +85 | –20 … +85 | –20 … +85 |
| Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| Power consumption | ||||
| During Heat up | W | ≤16 | ≤16 | ≤16 |
| At operating temperature | W | ≤11 | ≤11 | ≤11 |
| Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| Response time (2) | ms | 1 | 1 | 1 |
| Degree of protection | IP 30 | IP 30 | IP 30 | |
| Standards | ||||
| CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
| ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| SEMI compliance | SEMI S2 | SEMI S2 | SEMI S2 | |
| Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| Setpoint | ||||
| Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| Relay contact | V (dc) | ≤30 | ≤30 | ≤30 |
| Hysteresis | percent FS | 1 | 1 | 1 |
| Diagnostic port | ||||
| Protocol | USB | USB | USB | |
| Read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| Internal volume | ||||
| I. volume 1/2” tube | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| Weight | ||||
| Weight 1/2” tube | g | 837 | 837 | 837 |
| Weight DN 16 ISO KF | g | 852 | 852 | 852 |
| Weight DN 16 CF-R | g | 875 | 875 | 875 |
| Weight 8 VCR® | g | 897 | 897 | 897 |
| EtherCAT | ||||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| Digital functions read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |