MAG470
Inverted Magnetron Gauges
The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. The measurement range is from 5×10-11 mbar to 1×10-2 mbar.
Benefits
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical Applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Part Number
| MAG470 | |
| Part Number | Description |
|---|---|
| 399-360 | MAG470 DN 40 CF-F, FCC |
| 399-361 | MAG470 DN 40 CF-F, extendet |
| MAG470 extended | |
| Part Number | Description |
|---|---|
| 399-361 | MAG470 DN 40 CF-F, extendet |
Specifications
| Type | MAG470 | MAG470 extended | |
|---|---|---|---|
| Measurement range (air, N2) | 5×10-11 … 1×10-2 | 5×10-11 … 1×10-2 | |
| Accuracy (N2) | |||
| 1×10-9 … 1×10-3 mbar | % of reading | ≈±30 | ≈±30 |
| Repeatability | |||
| 1×10-9 … 1×10-3 mbar | % of reading | ≈±5 | ≈±5 |
| Mounting orientation | any | any | |
| Admissible pressure | bar (absolute) | ≤ 10 (limited to inert gases) | ≤ 10 (limited to inert gases) |
| Admissible temperature | |||
| Operation (ambient) | °C | +5 … +55 | +5 … +55 |
| Storage | °C | -40 … +65 | -40 … +65 |
| Bake-out | °C | 250 1) | 250 2) |
| Supply voltage | |||
| At gauge | V (dc) | +15 … +30 | +15 … +30 |
| At supply unit with max. cable length 3) | V (dc) | +16 … +30 | +16 … +30 |
| Ripple | V (p-p) | ≤1 | ≤1 |
| Power consumption | W | ≤2 | ≤2 |
| Fuse to be connected | AT | ≤1 | ≤1 |
| Output signal (measurement signal) | |||
| Voltage range | V | 0 … +10.5 | 0 … +10.5 |
| Measurement range | V | +1.96 … +8.6 | +1.96 … +8.6 |
| Voltage vs. pressure | logarithmic, 0.8 V/decade | logarithmic, 0.8 V/decade | |
| Error signal | V | < 0.5 (no supply) | < 0.5 (no supply) |
| Output impedance | Ω | 2×10 | 2×10 |
| Minimum loaded impedance | kΩ | 10, short-circuit proof | 10, short-circuit proof |
| Response time | |||
| p > 10-6 mbar | ms | <10 | <10 |
| p = 10-8 mbar | ms | ≈1000 | ≈1000 |
| Identification gauge | kΩ | 7.15, referenced to supply common | 7.15, referenced to supply common |
| Electrical connection | FCC 68 appliance connector, 8 poles, female | FCC 68 appliance connector, 8 poles, female | |
| Sensor cable | 8 poles plus shielding | 8 poles plus shielding | |
| Cable length | m | ≤50 (8×0.14 mm2) | ≤50 (8×0.14 mm2) |
| Operating voltage | kV | ≤3.3 | ≤3.3 |
| Operating current | µA | ≤100 | ≤100 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | Stainless steel, Al2O3, Ag | |
| Internal volume | cm³ | ≈20 | ≈20 |
| Weight DN40 CF-F | g | ≈950 | ≈1100 |
| Protection category | IP 40 | IP 40 | |
| Standards | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | |
1) Without electronics magnetic shielding
2) 250°C in defined area, see dimension
3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable