PPG550
The new INFICON Pirani Piezo combination gauge (PPG550) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available.
The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.
In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 … 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.
Last but not least the new INFICON PPG550 can be used to direct drop in replace the so called MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. Inficon offes same connectors/ pin assignment, analog output and RS232/485 compatibility.
Benefits
ATM to Medium Vacuum Gauge.
The new INFICON Pirani Piezo combination gauge (PPG550) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available.
The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.
In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 … 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.
Last but not least the new INFICON PPG550 can be used to direct drop in replace the so called MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. Inficon offes same connectors/ pin assignment, analog output and RS232/485 compatibility.
Typical Applications
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Part Number
Dimensions
Specifications
| Type | PPG550 MEMS | |
|---|---|---|
| Measurement principle | ||
| Pressure range | mbar | 2 … 1333 MEMS Piezo resistive diaphragm
1.5 … 2 Crossover range 1×10-6 … 1.5 MEMS Pirani therma conductivity |
| Measuring range | ||
| Range (N2) | mbar | 1×10-6 … 1333 |
| Accuracy | ||
| 1100 … 1333 mbar | % of reading | 0.5 |
| 800 … 1099 mbar | % of reading | 0.25 |
| 100 … 800 mbar | % of reading | 0.5 |
| 2 … 99.9 mbar | % of reading | 1 |
| 1 x 10-4 … 1.99 mbar | % of reading | 5 |
| 1 x 10-5 … 9.99 x 10-5 mbar | % of reading | 25 |
| Hysteresis | ||
| 10 … 1333 mbar | % of reading | 0.1 |
| 1 x 10-3 … 10 mbar | % of reading | 1 |
| Responsetime (ISO 19685:2017) | ms | <20 |
| Temperature compensation | °C | +10 … +50 |
| Temperature measurement absolute accuracy | °C | +/-1.5 (0 … +80) |
| Gas type dependence | look operating manual page 13 | |
| Solid state relay | ||
| Set point range | mbar | 5 x 10-6 … 1333 |
| Contact rating | 50 | |
| Contact on resistance | Ω | <35 |
| Contact endurance | Contact endurance | Unlimited (no mechanical wear) |
| Analog output | ||
| 3PPM-xxx-xxx0 | V | 0.61 … 10.2 |
| 3PPM-xxx-xxx2 | V | 0.375 … 5.570 |
| 3PPM-xxx-xxx3 | V | 1.0 … 9 |
| Error signal | V | Check operating Manual page 13 |
| Power Supply | ||
| Supply voltage at the gauge | V (dc) | +12 … 30 |
| Power consumption | W | <3.5 |
| Internal fuse (thermal recoverable) | mA | 100 |
| Reverse polarity and overvoltage protection | Reverse polarity and overvoltage protection | yes |
| Sensor cable connection | ||
| 3PPM-0xx-x0xx | IP40 | FCC 68, 8-pin electrical connection |
| 3PPM-0xx-xExx | IP40 | D-Sub HD, 15-pin, male electrical connector |
| 3PPM-0xx-xDxx | IP40 | D-Sub, 9-pin, male electrical connection |
| Sensor cable | Sensor cable | shielded, 0.14 mm2/ conductor |
| Cable lenght for analog operation | m | <100 |
| Cable lengt for RS232 operation | m | <15 |
| Cable lenght for RS482 operation | m | <1200 |
| RS232C/ RS485 interface | ||
| Data Rate | baud | 9600 (default) |
| Data format | bit | binary,
8 data bits onestop bit no parity bit no handshake For further informaion on RS232/ RS485 interfaceplease look operating manua page 15 |
| Materials exposed to vacuum | ||
| Flange | Flange | SS 1.4307, AISI 304L |
| Housing | Housing | SS 1.4307, AISI 304L, AL 6061 |
| Further parts | Further parts | AISI 304L, Kovar, glass, Silicon, nickel, AL, SiO2, Si3N4, gold, FPM, low outgassng epoxy resin, solder, RO4305 |
| Pressure max. | bar | 10 (absolute) |
| Admissible temperatures (ambiance) | ||
| Operation | °C | -20 … +50 |
| Storage | °C | -40 … +120 |
| Bakeout | °C | +120 (non operating) |
| Relative humidity ambiance (IEC 68-2-38); year`s mean/ during 60 days | % | 98 (non-condensing) |
| Use | m | Indoors only
altitude up to 2000 |
| Mounting orientation | any | |
| Protection class | IP40 | degree of protection |