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ATM to Medium Vacuum Gauge + ATM Switch

The new INFICON Pirani Piezo combination gauge (PPG570) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available, which is also used in our PPG550 “ATM to Medium Vacuum” Gauge.

What differentiate PPG570 from PPG550 is the additional installed ATM sensor that allows the use of PPG570 in classical Load-lock applications. For example in Semi-Conductor industries or any other vacuum applications where accurate pressure measurement relative to atmospheric ambient pressure is important.

The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.

In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 … 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.

Last but not least the new INFICON PPG570 can be used to direct drop in replace the so called  MKS Instruments MKS901P “MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducer”.  PPG570 offes same connectors/ pin assignment, analog output and RS232/485 digital communication protocol compatibility.


  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  •  Atmospheric ambient pressure measurement
  • Up to 3 solid state relays
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  • Digital interfaces RS232/ RS485
  • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
  • Compliance & standards: CE, EN, UL, CSA, RoHS

Typical Applications

  • Semiconductor load-lock applications
  • Use in Analytical equipment/ mass sepctrometers
  • Physical vapor deposition
  • Physical vapor deposition

Part Number



Type PPG570 MEMS
Measuring principle
Pressure range mbar 2 … 1333            MEMS Piezo resistive diaphragm

1.5 … 2                Crossover range

1×10-6 … 1.5     MEMS Pirani thermal conductivity

Measuring range
Range (N2) mbar 1×10-6 … 1333
1100 … 1333 mbar % of reading 0.5
800 … 1099 mbar % of reading 0.25
100 … 800 mbar % of reading 0.5
2 … 99.9 mbar % of reading 1
1 x 10-4 … 1.99 mbar % of reading 5
1 x 10-5 … 9.99 x 10-5 mbar % of reading 25
10 … 1333 % of reading 0.1
1 x 10-3 … 10 mbar % of reading 1
Barometric measurement range mbar 300 … 1200
Barometric accuracy mbar +0.5
Atmospheric referenced pressure output range mbar -1333 … +1333
Vacuum temperature sensor range °C -20 … +85
Vacuum temperature sensor accuracy °C +1.5
Transducer temperature sensor range °C -20 … +85
Transducer temperature sensor accuracy °C +1.5
Analog output resolution bit 16 (150 microvolt)
Analog output update rate Hz 124
Response time (ISO 19685:2017) ms <20
Temperature compensation °C +10 … +50
Temperature measurement range °C -40 … +80
Temperature measurement absolute accuracy °C +1.5 (0 … +80)
Gas type dependence Please look operating manual page 13
Solid state relay
Set point range (absolute) mbar 5 x 10-6 … 1333 mbar
Set point range (atm. relative) mbar -1100 … +500
Contact rating 50
Contact on resistance <35
Contact endurance Contact endurance Unlimited (no mechanical wear)
Analog output
3PPM-xxx-xxx0 V 0.61 … 10.2
3PPM-xxx-xxx2 V 0.375 … 5.570
3PPM-xxx-xxx3 V 1.0 … 9
3PPM-xxx-xxxZ V no analog signal
Error signal V please check operating manual page 13
Power supply
Supply voltage at thegauge V (dc) +12 … +30

ripple max. 1 Vpp

Power consumption W <3.5
Internal fuse mA 100 (thermal recoverable)
Reverse polarity and overvoltage protection Reverse polarity and overvoltage protection yes
Sensor cable connection
3PPM-0xx-x0xx IP40 FCC 68, 8-pin
3PPM-0xx-xDxx IP40 D-Sub, 9-pin, male
3PPM-0xx-xExx IP40 D-Sub HD, 15-pin, male
Sensor cable, shielded mm 0.14/ conductor
Cable lenght, analog operation m <100
Cable lenght, RS232 operation m <15
Cable lenght, RS485 operation m <1200
RS232C/ RS485 interface
Data rate baud 9600 (default)
Data format bit binary

8 data bits

one stop bit

no parity bit

no handshake

For further information please check out operating Manual page 15

Materials exposed to vacuum
Housing Housing SS 1.4307, AISI 304L, AL 6061
Flange Flange SS 1.4307, AISI 304L
Further parts Further parts AISI 304L, Kovar, glass, Silicon, nickel, AL, SiO2, Si3N4, gold, FPM, low outgassng epoxy resin, solder, RO4305
Pressure max. mbar 10 (absolute)
Admissible temperatures (ambiance)
Storage °C -40 … +20
Operation °C -20 … +50
Bakeout °C +120 (non operating)
Relative humidity (IEC 68-2-38) (year`s mean/ during 60 days) % 98 (non condensing)
Use m Indoors only

altidude up to 2000

Mounting orientation any
Protection class IP40 Degree of protection


3D Step Files