Augent® OPG550
The INFICON Augent® Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring.
Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7 mbar to atmosphere at the same time. Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. The fast optical measurement principle allows the detection of in principle any type of gas.
BENEFITS
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Specifications
| Measurement range N2 | mbar Torr |
1×10-7 … 5 (7.6×10-8 … 3.8)
|
| Accuracy total pressure reading N2 | ||
| 1 x 10-7 … 100 mbar | % of reading | 30 |
| 100 … 1000 mbar | % of reading | 50 |
| Repeatability total pressure reading N2 | ||
| 1 x 10-7 … 100 mbar | % of reading | 5 |
| Temperature | ||
| Operation (ambient) | °C | +5 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange with electronic unit | °C | <80 |
| Bakeout at flange w/o electronic unit | °C | <120 |
| Supply voltage | ||
| At gauge | V (dc) | +14.5 … +30 |
| Ripple | V (p-p) | <1 |
| Power consumption | W | <5 |
| Fuse to be connected | AT | 1 |
| Materials exposed to vacuum | ||
| General | General | Al2O3, Stainless steel |
| Anode | Anode | Molybdenum |
| Ionization chamber | Ionization chamber | Titanium, stainless steel |
| Ignition aid | Ignition aid | Stainless steel |