QMG 700
Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability.
Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for low masses. The instrument is a superb option for the most challenging measurements, including isotope analyses, such as helium and deuterium separation. Control your process with the QMG 700 and rely upon its superior long-term stability to protect critical measurements.
More than forty years of analytical mass spectrometry excellence at INFICON ensure the QMG 700 is the right choice for your next gas analysis investment. For consistent accuracy and precise results, you can rely on the INFICON QMG 700 and our worldwide applications expertise.
Benefits
- Mass range options from 1-512 amu
- More than nine decades of dynamic range
- Extremely fast measurement speeds: 0.125 ms/amu
- MDPP < 10E-16 mbar
- High resolution across entire mass range: Masses 1, 2, and 3 clearly separable in ppb range
- Multiple different ion source options
- Discrete or continuous dynode electron multiplier options
- IO option: 8 analog inputs/outputs and 32 digital inputs/outputs
- Powerful software with flexible and user friendly interface
Part number
| QMA 400 | Art.No. |
|---|---|
| QMA 400 with Grid Ion Source | 490-715 |
| Deckplatte kpl. DMM spez. | 450-119 |
| QMA 400 for PPM 422 standard | 490-601 |
| QMA 400 with Axial Ion Source | 490-700 |
| QMA 400 with Crossbeam | 490-701 |
| QMA 400, SEM 217, Crossbeam, Yt | 490-702 |
| QMA 410 | Art.No. |
| QMA 410 with Axial Ion Source | 490-810 |
| QMA 410,16mm Mo,217, W, CB-GT | 490-812 |
| QMA 410, SEM 217, crossbeam, Yt | 490-817 |
| QMA 410 Quadrup.-Analysator | 490-821 |
| QMA 410 mit CB-IQ mit Magn.,SEV218 | 490-830 |
| QMA 430 | Art.No. |
| QMA 430 mit CB-IQ, Faraday | 490-901 |
| QMA 430 with Axial-IQ, 90° SEV217 | 490-910 |
| QMA 430 with Grid Ion Source | 490-913 |
| QMA 430 grid Ion Source, vac.-annealed | 490-914 |
| QMA 430, CB-IQ without SEV217 | 490-916 |
| QMA 430 with CB Ion source, Gas Tight | 490-917 |
| QMA 430, CB Ion Source without SEV217 | 490-918 |
| QMA 430, SEM 217, Crossbeam, YT | 490-943 |
Specifications
| QMA 400 | |
| Mass Range | 1-512 amu (1) |
| Sensor Length | 441.5 mm |
| Rod Diameter | 8 mm |
| Rod Material | Molybdenum |
| Flange | DN 63 CF-F |
| Detector Type | Faraday/SEV 217 |
| Max. Operating Pressure (FC) | 1 E-4 mbar |
| Max. Operating Pressure (EM) | 1 E-5 mbar |
| Sensitivity | 5 E-4 A/mbar |
| Minimum Detectable Partial Pressure | 1 E-15 mbar |
| Resolution (adjustable) | 0.3 – 7 amu |
| Partial Pressure Ratio | < 0.5 ppb |
| Max. Operating Temp. Sensor | 150 °C |
| Max. Bakeout Temp. | 23.02.2023 |
| Max. Operating Temp. Electronics | 40 °C |
| Measurement Speed | 0.125 ms – 60 s/amu |
| Power Supply | 100 – 240 VAC |
| QMA 400 | |
| Mass Range | 1-340 amu (2) |
| Sensor Length | 548 mm |
| Rod Diameter | 16 mm |
| Rod Material | Molybdenum |
| Flange | DN 100 CF-F |
| Detector Type | Faraday/SEV 217 |
| Max. Operating Pressure (FC) | 1 E-4 mbar |
| Max. Operating Pressure (EM) | 1 E-5 mbar |
| Sensitivity | 1 E -3 A/mbar |
| Minimum Detectable Partial Pressure | 5 E-16 mbar |
| Resolution (adjustable) | 0.2 – 2.2 amu |
| Partial Pressure Ratio | < 0.5 ppb |
| Max. Operating Temp. Sensor | 150 °C |
| Max. Bakeout Temp. | 400 °C |
| Max. Operating Temp. Electronics | 40 °C |
| Measurement Speed | 0.125 ms – 60 s/amu |
| Power Supply | 100 – 240 VAC |
| QMA 430 | |
| Mass Range | 1-300 amu |
| Sensor Length | 441.5 mm |
| Rod Diameter | 8 mm |
| Rod Material | Stainless Steel |
| Flange | DN 63 CF-F |
| Detector Type | Faraday/SEV 217 |
| Max. Operating Pressure (FC) | 1 E-4 mbar |
| Max. Operating Pressure (EM) | 1 E-5 mbar |
| Sensitivity | 2 E-4 A/mbar |
| Minimum Detectable Partial Pressure | 1 E-15 mbar |
| Resolution (adjustable) | 0.3 – 7 amu |
| Partial Pressure Ratio | < 0.5 ppb |
| Max. Operating Temp. Sensor | 150 °C |
| Max. Bakeout Temp. | 400 °C |
| Max. Operating Temp. Electronics | 40 °C |
| Measurement Speed | 0.125 ms – 60 s/amu |
| Power Supply | 100 – 240 VAC |