Transpector® MPH
The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.
INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.
BENEFITS
- Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks
- TCP/IP Ethernet connectivity
- Dual filaments
- Field replaceable Electron Multiplier
- Combined anode, cathode and repeller filament kit
- Shorter sensors minimize installed footprint
- Nine-decade dynamic range
- MDPP of <2E-15 Torr (100 amu)
- Increased Signal-to-Noise ratio
- Interchangeable sensors and electronics
- Sensors are assembled, tested and double bagged in a cleanroom environment
- RoHS Compliant
Specifications
| MPH100M | MPH100F | MPH200M | MPH200F | MPH300M | MPH300F |
|
|---|---|---|---|---|---|---|
| Mass Range | 100 amu | 100 amu | 200 amu | 200 amu | 300 amu | 300 amu |
| Min. Detectable Partial Pressure | 2E-15 Torr | 3E-13 Torr | 3E-15 Torr | 4E-13 Torr | 4E-15 Torr | 5E-13 Torr |
| Sensitivity (FC) | 6E-4 A/Torr | 6E-4 A/Torr | 5E-4 A/Torr | 5E-4 A/Torr | 4E-4 A/Torr | 4E-4 A/Torr |
| Sensitivity (EM) | 500 A/Torr | NA | 500 A/Torr | NA | 250 A/Torr | NA |
| Max. Operating Pressure | 5E-4 Torr | 5E-4 Torr | 5E-4 Torr | 5E-4 Torr | 5E-4 Torr | 5E-4 Torr |
Accessories
| Part number | |
|---|---|
| 961-021-G1 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2m) US plug |
| 961-021-G2 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G3 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable |
| 961-021-G4 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug |
| 961-021-G5 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G6 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable |
| 600-1190-P8 | Ethernet 7m cable |
| 600-1190-P15 | Ethernet 15m cable |
| 600-1428-P1 | Power Supply Extension Cable- 15 ft (4.5m) |
| 600-1429-P1 | Power Supply Extension Cable – 30 ft (9m) |
| 961-417-G1 | Ethernet Router 4 port with Push Button Wi-Fi |
| 961-418-G1 | Ethernet Switch 8 port |
| 961-702-G1 | Pirani Interlock Kit |
| 914-024-G1 | Angle Valve Kit, Manual (includes heater) |
| 914-026-G1 | MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater) |
| 961-029-G1 | MPH Heater Kit 120 VAC |
| 961-029-G2 | MPH Heater Kit 230 VAC |
Consumables
Consumables
| Part number | |
|---|---|
| 961-700-G1 | Coated Iridium Filament Kit |
| 961-700-G2 | Tungsten Filament Kit |
| 961-701-G1 | Coated Iridium Filament Ion Source |
| 961-701-G2 | Tungsten Filament Ion Source |
| 961-2428-G2 | Electron Multiplier Replacement Kit |
Spare parts
Universal spare parts
| Part number | |
|---|---|
| 961-416-P1 | Spare MPH Heating Jacket |
| 914-407-P1 | Spare Valve Heating Jacket (required heater power cable if stand alone) |
| 600-1117-P1 | Spare Heater Power Cable 120 VAC |
| 600-1117-P2 | Spare Heater Power Cable 230 VAC |
| 914-410-P1 | Spare Angle Valve, Manual |
| 914-220-G1 | Spare Angle Valve, Air Operated |
| 961-206-G2 | MPH Extension Kit |
| 961-205-G2 | MPH HPR Extension Kit |
| 961-022-G1 | Spare O-Ring and Nut Kit |
| 074-5007-G1 | Gas Analysis Product Manuals CD |
Spare parts
| MPH100M | MPH100F | MPH200M | MPH200F | MPH300M | MPH300F |
|---|---|---|---|---|---|
| 961-H1MAS – MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Y2O3/Ir Filaments | 961-H1FAS – MPH Sensor, 100 AMU FC (MPH100F) w/ Y2O3/Ir Filaments | 961-H2MAS – MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Y2O3/Ir Filaments | 961-H2FAS – MPH Sensor, 200 AMU FC (MPH200F) w/ Y2O3/Ir Filaments | 961-H3MAS – MPH Sensor, 300 AMU EM/FC (MPH300M) w/ Y2O3/Ir Filaments | 961-H3FAS – MPH Sensor, 300 AMU FC (MPH300F) w/ Y2O3/Ir Filaments |
| 961-H1MBS – MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Tungsten Filaments | 961-H1FBS – MPH Sensor, 100 AMU FC (MPH100F) w/ Tungsten Filaments | 961-H2MBS – MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Tungsten Filaments | 961-H2FBS – MPH Sensor, 200 AMU FC (MPH200F) w/ Tungsten Filaments | 961-H3MBS – MPH Sensor 300 AMU EM/FC (MPH300M) w/ Tungsten Filaments | 961-H3FBS – MPH Sensor, 300 AMU FC (MPH300F) w/ Tungsten Filaments |
| MP-H10S – MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet | MP-H10S – MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet | MP-H20S – MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet | MP-H20S – MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet | MP-H30S – MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet | MP-H30S – MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet |