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SemiQCM® SR Sensors for Precursor Monitoring

Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

The SemiQCM SR sensor is one component of a system for precursor monitoring, with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).

Semi Process Monitoring can be used in semiconductor applications for endpoint detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.

The failure to deliver precursor to a wafer can be detected in as little as one wafer.

FEATURES

  • QCM data monitored at 10 Hz
  • FabGuard correlates QCM data to tool state and process step
  • Precise measurement of deposition or etch rates
  • Sensitivity & precision for sub-monolayer thickness measurement

BENEFITS

  • Real-time, in situ process monitoring
  • Prevent over-etching, identify chamber clean end point
  • Identify equipment or process state fault

TYPICAL APPLICATIONS

  • Semiconductor Manufacturing

Specifications

Maximum Temperature 200°C
Sensor Head Size (maximum envelope) 23.9 mm O.D. x 29.2 mm (0.94 in. O.D. x 1.15 in.)
Sensor Length (in vacuum) 50–150 mm (1.97–5.91 in.)
Mounting Feedthrough ISO KF/CF flange
Materials
Body and Holder 304 stainless steel
Springs Au-plated BeCu
Coaxial Line 4.8 mm (0.188 in.) O.D. stainless steel
Other Mechanical Parts 18-8 or 304 stainless steel, nickel C276
Insulators >96% Al2O3 in vacuum: Teflon® used elsewhere
Wire Ni in vacuum, Ni-plated Cu elsewhere
Braze Vacuum-process high-temperature NiCr alloy
Crystal 14.0 mm (0.551 in.) diameter

Part numbers

Part Number Description
750-7000-G5 SEMI QCM SENSOR ASSY 50MM
750-7000-G6 Semi QCM Sensor Assy 60mm
750-7000-G7 Semi QCM Sensor Assy 70mm
750-7000-G8 Semi QCM Sensor Assy 80mm
750-7000-G9 Semi QCM Sensor Assy 90mm
750-7000-G10 Semi QCM Sensor Assy 100mm
750-7000-G11 Semi QCM Sensor Assy 110mm
750-7000-G12 Semi QCM Sensor Assy 120mm
750-7000-G13 Semi QCM Sensor Assy 130mm
750-7000-G14 Semi QCM Sensor Assy 140mm
750-7000-G15 Semi QCM Sensor Assy 150mm

Consumables

Part Number Description
750-7013-G1S Crystal Holder Assembly Spare
750-1090-G10 Sensor Crystals, 6MHz, SC Alloy

Spare parts

Part Number Description
007-023 Ceramic Retainer
750-171-P1 Finger spring contact
750-7005-G1S Crystal Holder and Retainer Spring Spare Assembly
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