your best partner for vacuum
h » Controllers » XTC/3
D

XTC/3

Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.

FEATURES

  • Available in single-layer and multiple-layer models
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping
  • Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
  • XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
  • Easy-to-read TFT LCD graphics displays
  • Films and processes can be assigned unique, descriptive names for easy retrieval
  • Ethernet connection available
  • Free-standing (no computer necessary) or optional Windows® software for PC operation
  • Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)

TYPICAL APPLICATIONS

  • High End Optical Coatings

Specifications

  XTC3/S XTC3/M
Measurement Frequency Range 6.0 to 5.0 MHz (fixed) 6.0 to 5.0 MHz (fixed)
Thickness & Rate Resolution / Measurement (1) ±0.034 Å ±0.034 Å
Number of Sensor Inputs 2 2
Number of Source Outputs 2 2

Part number

  1. XTC3 Part Number

Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
Easy Rate Single Sensor Easy Rate Single Sensor
Easy Rate Dual Sensor Easy Rate Dual Sensor
ALD Sensor UHV Bakeable Sensor
UHV Bakeable Sensor Sputtering Sensor
Sputtering Sensor CrystalSix® Sensor
CrystalSix® Sensor Crystal 12® Sensor
Crystal 12® Sensor RSH-600 Rotary Sensor

Accessories and Replacement Parts

Part Number Description
755-262-G1 Handheld Power Controller (for manual power control)
780-702-G1 One unit rack mount kit – Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack
780-702-G2 Two unit rack mount kit – Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack
780-032-G1 Editor Software, XTC/3
779-220-G1 CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2 CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits (Includes oscillator and cables)
780-611-G15 XIU PKG with 15 ft. (4.6 m) cable – Fore use with XTC/3
780-611-G30 XIU PKG with 30 ft. (9.1 m) cable – For use with XTC/3
780-611-G50 XIU PKG with 50 ft. (15.2 m) cable – For use with XTC/3
780-611-G100 XIU PKG with 100 ft. (30.5 m) cable – For use with XTC/3
780-612-G15 4m XIU PKG with 15 ft. (4.6 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-612-G30 4m XIU PKG with 30 ft. (9.1 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-612-G50 4m XIU PKG with 50 ft. (15.2 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-612-G100 4m XIU PKG with 100 ft. (30.5 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-613-G15 4m XIU PKG with 15 ft. (4.6 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-613-G30 4m XIU PKG with 30 ft. (9.1 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-613-G50 4m XIU PKG with 50 ft. (15.2 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3
780-613-G100 4m XIU PKG with 100 ft. (30.5 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3
Oscillator Only (No cables included)
780-600-G1 XTC/3 XIU (oscillator) – For XIU to sensor head cable lengths of 6 in. to 72 in. (15 cm to 183 cm)
780-600-G2 XTC/3 XIU (oscillator) – For XIU to sensor head cable lengths of 118 in. to 157 in. (3 m to 4 m)
Cables
755-257-G6 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P15 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P100 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Go to

^