CDGsci
The high end INFICON Cube Capacitance Diaphragm Instrument is the most accurate (≤ 0.025 % Rd accuracy; ≤ 50 ppm FS Repeatability) and most stable vacuum gauge available (< 5 ppm FS/ °C temperature stability; < 70 ppm FS/ year long term stability). Cube is designed as a pure reference device to standardize vacuum measurement systems and is the only choice for vacuum research applications. The proven INFICON temperature controlled, corrosion resistant ultrapure ceramic sensor is the heart of the Cube`s outstanding performance. Cube sets new standards in modern communication and user flexibility with a 20 Bit analog output and RS232-C, TCP / IP and HTML digital output connected through wireless or wired Ethernet interface. Each device comes with a quality assurance certificate, hand-signed by the Cube’s leading product researchers. Delivery in a reusable hard shell suit case for storage or shipment to calibration laboratories underlines its professonality.
Benefits
- True high precision pressure measurement – Ceramic technology
- Full stable output – Proven by PTB
- Flexible communication – Various modern interfaces
- All functions integrated – No controller required
- Direct mounting to chamber – Optimized center of gravity
- Transportation without isolation valve possible
Typical Applications
- Transfer standard
- Main reference gauge
- Research
- In-house standard
Part Number
Dimensions
Specifications
Type | 1000 Torr | 100 … 1 Torr | 100mTorr | |
---|---|---|---|---|
Accuracy (1) | % of reading | 0.025 | 0.025 | 0.05 |
Temperature effect | ||||
on zero | percent FS/°C | 0.0005 | 0.0005 | 0.005 |
on span | % of reading / °C | 0.001 | 0.001 | 0.01 |
Pressure, max. | bar (absolute) | 3 | 2.5 | 1.5 |
Lowest reading | percent FS | 0.01 | 0.01 | 0.01 |
Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 |
Temperature | ||||
Operation (ambient) | °C | +10 … +40 | +10 … +40 | +10 … +40 |
Storage | °C | –10 … +50 | –10 … +50 | –10 … +50 |
Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
Power consumption | ||||
During Heat up | W | ≤15 | ≤15 | ≤12 |
At operating temperature | W | ≤10 | ≤10 | ≤8 |
Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
Response time (2) | ms | 100 | 100 | 100 |
Degree of protection | IP 40 | IP 40 | IP 40 | |
Standards | ||||
CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
SEMI compliance | SEMI S2 | SEMI S2 | SEMI S2 | |
Electrical connection | D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC | D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC | D-sub, 15 pole, male | |
Setpoint | ||||
Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
Relay contact | V (dc) | ≤30 | ≤30 | ≤30 |
Hysteresis | percent FS | 1 | 1 | 1 |
Diagnostic port | ||||
Protocol | Web pages, REST services, RS232-ASCII | Web pages, REST services, RS232-ASCII | RS232-C | |
Read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
Internal volume | ||||
I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
Weight | ||||
Weight DN 16 ISO KF | g | 1670 | 1670 | 1670 |
Weight DN 16 CF-R | g | 1670 | 1670 | 1670 |
Weight 8 VCR® | g | 1670 | 1670 | 1670 |