CDG025D-X3 4-20mA
The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function. New Version with 2wire current Loop is now available. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.
Benefits
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor double protected from contamination
- One pushbutton zero function
- Interface with 2-wire current loop
- Long cable distance (<300m)
- Low energy gauge
- Remote zero included
- Clean room compliant
- Status LED
Typical Applications
- Chemical vacuum
- Energy application
- Industrial vacuum equipment
Part Number
Dimensions
Specifications
Type | 1000 Torr / 1100 mbar | 500 … 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr | 0.1 Torr / mbar | |
---|---|---|---|---|---|---|
Accuracy (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
Temperature effect | ||||||
on zero | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
on span | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
Resolution | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
Pressure, max. | kPa (absolute) | 300 | 200 | 200 | 200 | 130 |
Response time (2) | ms | ≤100 | ≤100 | ≤100 | ≤100 | ≤100 |
Lowest reading | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
Lowest suggested control pressure | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
Temperature | ||||||
Operation (ambient) | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
Bakeout at flange (3) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
Storage | °C | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 |
Supply voltage | V (dc) | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 |
Output signal (analog) | ||||||
2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | ||
Signal range | mA | 3.8 … 20.2 | 3.8 … 20.2 | 3.8 … 20.2 | 3.8 … 20.2 | 3.8 … 20.2 |
Measuring range (zero …FS) | mA | 4.0 … 20.0 | 4.0 … 20.0 | 4.0 … 20.0 | 4.0 … 20.0 | 4.0 … 20.0 |
Relationship current-pressure | linear | linear | linear | linear | linear | |
Loaded impedance RL | ||||||
Ω | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | |
absolute | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | |
absolute | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | |
absolute | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | 309 … 657 Ω at 24 V (dc) (4) | |
remote zero input | ||||||
2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | ||
High level | +21 … +27 V(dc) / ≤8 mA | +21 … +27 V(dc) / ≤8 mA | +21 … +27 V(dc) / ≤8 mA | +21 … +27 V(dc) / ≤8 mA | +21 … +27 V(dc) / ≤8 mA | |
Low level | V (dc) | ≤2 | ||||
Remote zero function | ||||||
High level (pulse >1s) | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | |
Low level | measurement operation | measurement operation | measurement operation | measurement operation | ||
Degree of protection | IP 30 | IP 30 | IP 30 | IP 30 | IP 30 | |
Standards | ||||||
CE conformity | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | |
ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
Electrical connection | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
Sensor cable | ||||||
Without remote zero | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | |
With remote zero | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | |
Internal volume | ||||||
I. volume 1/2” tube | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
I. volume DN 16 ISO KF | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
I. volume DN 16 CF-R | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
I. volume 8 VCR® | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
Weight | ||||||
Weight 1/2” tube | g | 310 | 310 | 310 | 310 | 310 |
Weight DN 16 ISO KF | g | 330 | 330 | 330 | 330 | 330 |
Weight DN 16 CF-R | g | 350 | 350 | 350 | 350 | 350 |
Weight 8 VCR® | g | 370 | 370 | 370 | 370 | 370 |
(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 … 90 percent FS
(3) Non operation
(4) Supply voltage at the gauge
(5) 18% Cr, 10% Ni, 3% Mo, 69% Fe