BPG402
ATM to Ultra-High Vacuum Gauge
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.
Benefits
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical Applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Part Number
| 353-570 | BPG402-S DN 25 ISO-KF |
|---|---|
| 353-571 | BPG402-S DN 40 CF-R |
| 353-572 | BPG402-S LCD, DN 25 ISO-KF |
| 353-573 | BPG402-S LCD, DN 40 CF-R |
| 353-574 | BPG402-SP PBus, DN 25 ISO-KF |
| 353-575 | BPG402-SP PBus, DN 40 CF-R |
| 353-576 | BPG402-SD DNet, DN 25 ISO-KF |
| 353-577 | BPG402-SD DNet, DN 40 CF-R |
| 353-578 | BPG402-SL long tube DN 40 CF-R |
| 353-590 | BPG402-SE ECAT, DN 25 ISO-KF |
| 353-591 | BPG402-SE ECAT, DN 40 CF-R |
Dimensions
Specifications
| Type | BPG402-S | |
|---|---|---|
| Measurement range (air, O2, CO, N2) | mbar | 5×10-10 … 1000 |
| Accuracy | ||
| 10-8 … 10-2 mbar | % of reading | ±15 |
| Repeatability | ||
| 10-8 … 10-2 mbar | % of reading | 5 |
| Degas (1) | ||
| p < 7.2 × 10-6 | mbar | electron bombardment, max. 3 min |
| Pressure, max. | bar (absolute) | 2 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange without electronics BPG402-S | °C | 80 |
| Bakeout at flange without electronics BPG402-SL | °C | 150 |
| Supply voltage | VDC | +20 … +28 |
| Output signal analog | ||
| Output signal | V | 0 … +10 |
| Measurement range | V | +0.774 … +10 |
| Voltage vs. pressure | volts per decade | 0.75 |
| Error signal | V | 0.1 / 0.3 / 0.5 |
| Load impedance, min. | kΩ | 10 |
| Setpoint relay | ||
| Number of setpoints | 1 | |
| Range | mbar | 1×10-9 … 100 |
| Relay contact | n.o., potential free | |
| Hysteresis | % of reading | 10 |
| Contact rating | VDC | ≤30 |
| Digital functions | degas | |
| Interface (digital) (2) | RS232C | |
| Emission control | automatic / manual via interface | |
| Filament | two Yt2O3 coated Ir | |
| Filament status / relay | LED / relay | |
| Electrical connection | D-Sub, 15-pin, male | |
| Cable length, max. (3) | m (ft.) | 100 (330) |
| Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass | |
| Internal volume KF / CF | cm³ (in.³) | 24 (1.46) / 34 (2.1) |
| Weight KF / CF | g | 450 / 710 |
| Degree of protection | IP30 | |
| Profibus DP | ||
| Baud rates | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address | 2 switches (address 00 – 127) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |
| Analog functions | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |
| Setpoint relays: Number of setpoints | 2 | |
| Setpoint relays: Range | mbar | 1×10-9 … 100 |
| Setpoint relays: Relay contact | n.o., potential free | |
| Setpoint relays: Hysteresis | % of reading | 10 |
| Setpoint relays: Contact rating | VDC | ≤30 |
| Connector for Profibus DP | D-Sub, 9-pin, female | |
| Connector for CDG (analog output, supply voltage, setpoints) | D-Sub, 15-pin, male | |
| DeviceNet™ | ||
| Protocol | DeviceNet™, group 2 slave only | |
| Data rate switch | kBaud | 125, 250, 500 or network programmable |
| Cable length 125 kbps | m (ft.) | 500 (1650) |
| Cable length 250 kbps | m (ft.) | 250 (825) |
| Cable length 500 kbps | m (ft.) | 100 (330) |
| MAC ID | 2 switches (address 00 – 63) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |
| Analog functions | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |
| Specification | DeviceNet™ “Vacuum Gauge Device Profile” | |
| Device type | ”CG” for combination gauge | |
| I / O slave messaging | polling only | |
| Setpoint relay: Number of setpoints | 2 | |
| Setpoint relays: Range | mbar | 1×10-9 … 100 |
| Setpoint relays: Relay contact | n.o., potential free | |
| Setpoint relays: Hysteresis | % of reading | 10 |
| Setpoint relays: Contact rating | VDC | ≤30 |
| Supply voltage for DeviceNet™ | VDC | +11 … +25 |
| Supply voltage for gauge | VDC | +20 … +28 |
| Connector for DeviceNet™ | Microstyle, 5-pin | |
| Connector for BPG (analog output, supply voltage, setpoints) | D-Sub, 15-pin, male | |
| EtherCAT | ||
| Protocol EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | |
| Digital functions EtherCAT | read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information | |
| Process data | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) |
1) Reduced accuracy during degas
2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed
3) For RS232C operation <30m