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HPG400

ATM to High-Vacuum Gauge

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere). The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Benefits

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions

 

Typical Applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

Part Number

353-520 HPG400 DN 25 ISO-KF
354-486 HPG400 Spare meas. system DN 25 ISO-KF
353-521 HPG400 LCD, DN 25 ISO-KF
353-522 HPG400 DN 40 CF-F
353-523 HPG400 LCD, DN 40 CF-F
353-525 HPG400-SP PBus, DN 25 ISO-KF
353-526 HPG400-SP PBus, DN 40 CF-F
353-527 HPG400-SD DNet DN 25 ISO-KF
353-528 HPG400-SD DNet DN 40 CF-F

Dimensions

dimensions

Specifications

Type HPG400
Measurement range (air, N2) mbar 2×10-6 … 1000
Accuracy
10-5 … 1 mbar % of reading ±15 (1)
Repeatability
10-5 … 10-1 mbar % of reading 2
10-1 … 100 mbar % of reading 30
Hot ion emission on, selectable:
option 1 mbar 1
option 2 mbar 5×10-1
option 3 mbar 2×10-1
option 4 mbar 1×10-1
option 5 mbar 5×10-2
Pressure, max. bar (absolute) 2
Temperature
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange °C 80
Bakeout electronics removed °C 150
Supply voltage  VDC 20 … 28
Output signal analog
Output signal V 0 … +10.2
Measurement range hot cathode V 1.5 … 7.5
Measurement range Pirani V 8.5 … 9.75
Voltage vs. Pressure hot cathode volts per decade 1
Voltage vs. Pressure Pirani volts per decade 0.25
Error signal hot cathode V 0.3
Error signal Pirani V 0.5
Load impedance, min. kΩ 10
Interface (digital) (2) RS232C
Electrical connection D-Sub, 15-pin, male
Cable length, max. (3) m (ft.) 100 (330)
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 20 (1.2) / 30 (1.8)
Weight KF / CF g 430 / 695
Degree of protection IP30
DeviceNet™
Protocol DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825)
Cable length 500 kbps m (ft.) 100 (330)
MAC ID 2 switches (address 00 – 63) or network programmable
Network size up to 64 nodes per segment
Digital functions read pressure, select units: Torr, mbar, Pa; Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Visual communication indicators LED network status (green / red) ; LED module status (green / red)
Specification DeviceNet™ “Vacuum Gauge Device Profile”
Device type ”CG” for combination gauge
I / O slave messaging polling only
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 2×10-6 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating V (dc) 60
Supply voltage for DeviceNet™ V (dc) 11 … 25
Supply voltage for gauge V (dc) 20 … 28
Connector for DeviceNet™ Microstyle, 5-pin
Connector for HPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
Profibus DP
Baud rates kBaud 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 – 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 2×10-6 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating V (dc) 60
Connector for Profibus DP D-Sub, 9-pin, female
Connector for HPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male

Accessories

Part Number Description
211-113 Centering ring with baffle DN 25 KF
353-511 Power supply BPG400 24VDC
357-499 Baffle HPG (10 pieces)

Spare Parts

Part Number Description
354-487 Spare sensor head HPG400, DN 25 ISO-KF
354-488 Spare sensor head HPG400, DN 40 CF-F

3D Step Files

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