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CDG160D

INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control. CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Benefits

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS
  • Also with EtherCAT digital interface available

Typical Applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

Dimensions

Specifications

Type 1000 … 500 Torr / mbar 200 … 1 Torr / mbar
Accuracy (1) % of reading 0.4 0.4
Temperature effect
on zero percent FS/°C 0.005 0.005
on span % of reading / °C 0.02 0.02
Pressure, max. kPa (absolute) 400 260
Resolution percent FS 0.003 0.003
Lowest reading percent FS 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5
Temperature
Operation (ambient) (4) °C +10 … +50
Bakeout at flange °C ≤200 ≤200
Storage °C –40 … +65 –40 … +65
Supply voltage +21 … +30 V DC or ±15 V (±5%) +21 … +30 V DC or ±15 V (±5%)
Power consumption
During Heat up W ≤18 ≤18
At operating temperature W ≤12 ≤12
Output signal (analog) V (dc) 0 … +10 0 … +10
Response time (2) ms 30 30
Degree of protection IP 40 IP 40
Standards
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2 SEMI S2
Electrical connection D-Sub, 15-pin, male D-Sub, 15-pin, male
Setpoint
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact V (dc) ≤30 ≤30
Hysteresis percent FS 1 1
Diagnostic port
Protocol RS232-C RS232-C
Read pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))
Internal volume
I. volume 1/2” tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
Weight
Weight 1/2” tube g 837 837
Weight DN 16 ISO KF g 852 852
Weight DN 16 CF-R g 875 875
Weight 8 VCR® g 897 897
EtherCAT
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge”
Node address Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330)
DeviceNet™
Protocol DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only
Data rate kBaud 125, 250, 500 by switch or network programmable 125, 250, 500 by switch or network programmable
Cable length 125 kbps m (ft.) 500 (1650) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825) 250 (825)
Cable length 500 kbps m (ft.) 100 (330) 100 (330)
MAC ID address 00 – 63 by switch or network programmable address 00 – 63 by switch or network programmable
Digital functions read pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Specification DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) DeviceNet™ “Vacuum Gauge Device Profile” (ODVA)
Device type ”VG” vacuum gauge ”VG” vacuum gauge
I / O slave messaging polling only polling only
Supply voltage for gauge at D-sub connector +14 … +30 VDC or ±15 V / ≤12 W +14 … +30 VDC or ±15 V / ≤12 W
Supply voltage for DeviceNet transceiver at microstyle connector 24 V nom / <2 W (11 … 25 V) 24 V nom / <2 W (11 … 25 V)
Connector for DeviceNet™ microstyle, 5 pin, male microstyle, 5 pin, male
Connector for CDG (analog output, supply voltage CDG, setpoints) D-sub, 15 pin, male D-sub, 15 pin, male
Profibus DP
Baud rates kBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500
Address address 00 – 125 by switch or network programmable address 00 – 125 by switch or network programmable
Digital functions Read pressure, status, ID pressure, status, ID
Digital functions Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Connector for Profibus DP D-sub, 9 pin, female D-sub, 9 pin, female
Connector for CDG (analog output, supply voltage, setpoints) D-sub, 15 pin, male D-sub, 15 pin, male
(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 10 … 90 percent FS (3) 18% Cr, 10% Ni, 3% Mo, 69% Fe (4) Ambient temperatures >40°C may increase surface temperatures above SEMI S2 compliance levels

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