CDG100D
INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.
Benefits
- Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
- Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical Applications
- Etch, CVD, PVD and other semiconductor production processes
- Chemical and corrosive high temperature processes
- General thin film and vacuum processes requiring gauge protection
Dimensions
Specifications
| Type | 1000 … 500 Torr / mbar | 200 … 1 Torr / mbar | 0.5 … 0.1 Torr / mbar | |
|---|---|---|---|---|
| Accuracy (1) | % of reading | 0.2 | 0.2 | 0.4 |
| Temperature effect | ||||
| on zero | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| on span | % of reading / °C | 0.02 | 0.02 | 0.02 |
| Pressure, max. | kPa (absolute) | 400 | 260 | 130 |
| Resolution | percent FS | 0.003 | 0.003 | 0.003 |
| Lowest reading | percent FS | 0.01 | 0.01 | 0.01 |
| Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 |
| Lowest suggested control pressure | percent FS | 0.5 | 0.5 | 0.5 |
| Temperature | ||||
| Operation (ambient) (5) | °C | +10 … +50 | ||
| Bakeout at flange | °C | ≤110 | ≤110 | ≤110 |
| Storage | °C | –20 … +65 | –40 … +65 | –40 … +65 |
| Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| Power consumption | ||||
| During Heat up | W | ≤20 | ≤15 | ≤15 |
| At operating temperature | W | ≤14 | ≤10 | ≤10 |
| Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| Response time (2) | ms | 30 | 30 | 130 / 30 (3) |
| Degree of protection | IP 40 | IP 40 | IP 40 | |
| Standards | ||||
| CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
| ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| SEMI compliance (5) | SEMI S2 | |||
| Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| Setpoint | ||||
| Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| Relay contact | V (dc) | ≤30 | ≤30 | ≤30 |
| Hysteresis | percent FS | 1 | 1 | 1 |
| Diagnostic port | ||||
| Protocol | RS232-C | RS232-C | RS232-C | |
| Read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| Internal volume | ||||
| I. volume 1/2” tube | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| Weight | ||||
| Weight 1/2” tube | g | 837 | 837 | 837 |
| Weight DN 16 ISO KF | g | 852 | 852 | 852 |
| Weight DN 16 CF-R | g | 875 | 875 | 875 |
| Weight 8 VCR® | g | 897 | 897 | 897 |
| EtherCAT | ||||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| Digital functions read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| DeviceNet™ | ||||
| Protocol | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
| Data rate | kBaud | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable |
| Cable length 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| Cable length 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| Cable length 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | address 00 – 63 by switch or network programmable | address 00 – 63 by switch or network programmable | address 00 – 63 by switch or network programmable | |
| Digital functions read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Specification | DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) | DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) | DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) | |
| Device type | ”VG” vacuum gauge | ”VG” vacuum gauge | ”VG” vacuum gauge | |
| I / O slave messaging | polling only | polling only | polling only | |
| Supply voltage for gauge at D-sub connector | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | |
| Supply voltage for DeviceNet transceiver at microstyle connector | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | |
| Connector for DeviceNet™ | microstyle, 5 pin, male | microstyle, 5 pin, male | microstyle, 5 pin, male | |
| Connector for CDG (analog output, supply voltage CDG, setpoints) | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
| Profibus DP | ||||
| Baud rates | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address | address 00 – 125 by switch or network programmable | address 00 – 125 by switch or network programmable | address 00 – 125 by switch or network programmable | |
| Digital functions Read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| Digital functions Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Connector for Profibus DP | D-sub, 9 pin, female | D-sub, 9 pin, female | D-sub, 9 pin, female | |
| Connector for CDG (analog output, supply voltage, setpoints) | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 10 … 90 percent FS (3) For pressure control type only. (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe (5) Ambient temperatures >40°C may increase surface temperatures above SEMI S2 compliance levels