MPG40x
ATM to Ultra-High Vacuum Gauge
The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar toatmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.
Benefits
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical Applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Part Number
| MPG400 FPM sealed | |||||
|---|---|---|---|---|---|
| Part Number | Description | ||||
| 351-010 | MPG400 FPM sealed, DN 25 ISO-KF | ||||
| 351-011 | MPG400 FPM sealed, DN 40 ISO-KF | ||||
| 351-012 | MPG400 FPM sealed, DN 40 CF-F | ||||
| MPG401 metal-sealed | |||||
| Part Number | Description | ||||
| 351-020 | MPG401 metal sealed, DN 25 ISO-KF | ||||
| 351-021 | MPG401 metal sealed, DN 40 ISO-KF | ||||
| 351-022 | MPG401 metal sealed, DN 40 CF-F | ||||
| 351-023 | Magnetic shield | ||||
Dimensions
Specifications
| Type | MPG400 FPM sealed | MPG401 metal-sealed | |
|---|---|---|---|
| Measurement range (air, N2) | mbar | 5 x 10-9 … 1000 | 5 x 10-9 … 1000 |
| Accuracy (N2) | |||
| 1 x 10-8 … 100 mbar | % of reading | ≈±30% | ≈±30% |
| Repeatability | |||
| 1 x 10-8 … 100 mbar | % of reading | ≈±5% | ≈±5% |
| Mounting orientation | any | any | |
| Admissible pressure | bar (absolute) | ≤10 (limited to inert gases) | ≤10 (limited to inert gases) |
| Admissible temperature | |||
| Operation (ambient) | °C | +5 … +55 | +5 … +55 |
| Storage | °C | –40 … +65 | –40 … +65 |
| Bake-out (1) | °C | 150 | 150 |
| Filament temperature (Pirani) | °C | 120 | 120 |
| Supply voltage | |||
| At gauge | V (dc) | +15 … +30 | +15 … +30 |
| At supply unit with max. cable length (2) | V (dc) | +16 … +30 | +16 … +30 |
| Ripple | V (p-p) | ≤1 | ≤1 |
| Power consumption | W | ≤2 | ≤2 |
| Fuse to be connected | AT | ≤1 | ≤1 |
| Output signal (measurement signal) | |||
| Voltage range | V | 0 … +10.5 | 0 … +10.5 |
| Measurement range | V | +1.82 … +8.6 | +1.82 … +8.6 |
| Voltage vs. Pressure | logarithmic, 0.6 volts per decade | logarithmic, 0.6 volts per decade | |
| Error signal | |||
| no supply | V | <0.5 | <0.5 |
| Pirani sensor, filament rupture | V | >9.5 | >9.5 |
| Output impedance | Ω | 2 x 10 | 2 x 10 |
| Minimum loaded impedance | kΩ | 10, short-circuit proof | 10, short-circuit proof |
| Response time | |||
| p > 10-6 mbar | ms | <10 | <10 |
| p = 10-8 mbar | ms | ≈1000 | ≈1000 |
| Identification gauge | 85, referenced to supply common | 85, referenced to supply common | |
| Status | |||
| Pirani-only mode | V | 0 (low) | 0 (low) |
| Combined Pirani / cold cathode mode | V | 15 … 30 (high) | 15 … 30 (high) |
| LED | LED green | high voltage on | high voltage on |
| Electrical connection | FCC 68 appliance connector, 8 poles, female | FCC 68 appliance connector, 8 poles, female | |
| Sensor cable | 8 poles plus shielding | 8 poles plus shielding | |
| Cable length | m | ≤50 (8 x 0.14 mm2) | ≤50 (8 x 0.14 mm2) |
| Operating voltage | kV | ≤3.3 | ≤3.3 |
| Operating current | µA | ≤500 | ≤500 |
| Materials exposed to vacuum | stainless steel, Al2O3, FPM75, Mo, Ni, Au, W | stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W | |
| Internal volume | cm³ | ≈20 | ≈20 |
| Weight | |||
| DN 25 ISO-KF | g | ≈700 | ≈730 |
| DN 40 ISO-KF | g | ≈720 | ≈750 |
| DN 40 CF-F | g | ≈980 | ≈1010 |
| Protection category | IP 40 | IP 40 | |
| Standards | |||
| CE conformity | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | |
1) Without electronics and magnetic shielding.
2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Accessories
| MPG400 FPM sealed | |
|---|---|
| Part Number | Description |
| 351-023 | Magnetic shield |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-023 | Magnetic shield |
Spare Parts
| MPG400 FPM sealed | |
|---|---|
| Part Number | Description |
| BN846469-T | Spare measurement system MPG400 |
| BN846470-T | Spare measurement system MPG400 DN40 KF |
| BN846471-T | Spare measurement system MPG400 DN40CF-F |
| 351-994 | MPG40x Ignition tool set |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-998 | MPG400 Repair set. |
| 351-999 | MPG400 Maintenance set |
| MPG401 metal-sealed | |
| Part Number | Description |
| BN846472-T | Replacement meas. unit MPG401 DN25 KF |
| BN846473-T | Replacement meas. unit MPG401 DN40 KF |
| BN846474-T | Spare meas. system, MPG401 DN40CF-F |
| 351-994 | MPG40x Ignition tool set |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-996 | MPG401 Repair set |
| 351-997 | MPG401 Maintenance set |