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Medium to Ultra-High Vacuum Gauge

The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.


  • Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
  • All-metal cold cathode sensor (Penning) with ceramic feedthrough
  • Innovative electrode geometry provides excellent ignition properties
  • Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
  • The anode ring and the titanium cathode can be cleaned or replaced easily
  • Minimal magnetic field intensity adjacent to gauge
  • LED indicator for power on and plasma ignited
  • Logarithmic analog output signal
  • Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications

Typical Applications

  • High vacuum pressure monitoring
  • Evaporation and sputtering systems
  • General vacuum measurement and control in the fine and high vacuum range

Part Number

351-000 PEG100 DN 25 ISO-KF
351-002 PEG100 DN 40 CF-F
351-003 PEG100-D DNet, DN 25 ISO-KF
351-004 PEG100-D DNet, DN 40 CF-F
351-005 PEG100-P PBus, DN 25 ISO-KF




Type PEG100
Measurement range mbar 1 x 10-9 to 1 x 10-2
10-8 to 10-4 mbar % of reading ±30
Pressure, max. (absolute) bar 10
Operation (ambient) °C +10 to +50
Storage °C -20 to +75
Bakeout without electronics °C 350
Bakeout with electronics, at flange °C 70
Voltage V (dc) 14.5 to 36
Consumption, max. W <2
Output signal analog
Output signal V 0 to 10.6
Measurement range V 0.66 to 10
Relation voltage / pressure volts per decade 1.333
Connector FCC 68, female, 8 pin (shielded)
Cable length, max (analog) m (ft.) 100 (330)
Materials exposed to vacuum Stainless steel, CrNi, AI2O3, NiFe, Mo, Cu, Ni, Ti
Internal volume cm³ (in.³) 21 (1.28)
Weight, approx. g 500
Protection type IP40
Device type generic
Explicit peer to peer messaging no
I / O peer to peer messaging no
Configuration consistency value no
Faulted node recovery no
Baud rates kBaud 125 / 250 / 500
Master / Scanner no
I / 0 slave messaging: Bit Strobe yes
I / 0 slave messaging: Polling yes
I / 0 slave messaging: Cyclic yes
I / 0 slave messaging: Change of State (COS) yes
Supply for DeviceNet™ V (dc) 11 to 25
Connector for DeviceNet™ Phoenix Combicon, 5 pin
Profibus DP
Supported baud rates (auto detection) kBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 / 1500
Expanded user parameter data byte 5
Configuring: Number of input and output data 2
Sync-Mode and Freeze-Mode Yes
Connector for Profibus D-sub, 9 pin

Spare Parts

Part Number Description
351-490 Spare Cathode Plate, set of 5 pcs