PSG55x
ATM to Medium Vacuum Gauge
The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The rugged sensor design combined with the compact size and the variety of features qualifies as the right product for measurement from low to the high vacuum range.
Benefits
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation – provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical Applications
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control from low to the high vacuum range
Part Number
Dimensions
Specifications
| Type | PSG550 Tungsten | PSG552 Nickel | PSG554 ceramic coated | |
|---|---|---|---|---|
| Measurement range | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| Accuracy (N2) | ||||
| 5×10-4 … 1×10-3 mbar | % of reading | ±50 | ±50 | ±50 |
| 1×10-3 … 100 mbar | % of reading | ±15 | ±15 | ±15 |
| 100 … 1000 mbar | % of reading | ±50 | ±50 | ±50 |
| Repeatability (N2) | ||||
| 1×10-3 … 100 mbar | % of reading | ±2 | ±2 | ±2 |
| Admissible pressure | bar (absolute) | ≤5 | ≤5 | ≤5 |
| Pressure, max. | bar (absolute) | 10 | 10 | 10 |
| Admissible temperature | ||||
| Operation (ambient) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| Storage | °C | -20 … +65 | -20 … +65 | -20 … +65 |
| Bakeout at flange | °C | ≤80 | ≤80 | ≤80 |
| Bakeout at flange long tube | °C | ≤250 | ≤250 | ≤250 |
| Supply voltage | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| Power consumption | ||||
| Without fieldbus | W | ≤2.5 | ≤2.5 | ≤2.5 |
| DeviceNet™ | W | ≤3 | ≤3 | ≤3 |
| Profibus | W | ≤3 | ≤3 | ≤3 |
| Output signal analog 3PIx-0xx-xxx0 | V | 0 … +10 | 0 … +10 | 0 … +10 |
| Output signal analog 3PIx-0xx-xxx1 | V | 0 … +8.5 | 0 … +8.5 | 0 … +8.5 |
| Output signal analog 3PIx-0xx-xxx2 | V | 0 … +5.529 | 0 … +5.529 | 0 … +5.529 |
| Output signal analog 3PIx-0xx-xxx3 | V | 0 … +8.875 | 0 … +8.875 | 0 … +8.875 |
| Measuring range 3PIx-0xx-xxx0 | V | +0.61 … +10 | +0.61 … +10 | +0.61 … +10 |
| Measuring range 3PIx-0xx-xxx1 | V | +1.2 … +8.5 | +1.2 … +8.5 | +1.2 … +8.5 |
| Measuring range 3PIx-0xx-xxx2 | V | +0.375 … +5.529 | +0.375 … +5.529 | +0.375 … +5.529 |
| Measuring range 3PIx-0xx-xxx3 | V | +1.57 … +8.875 | +1.57 … +8.875 | +1.57 … +8.875 |
| Voltage vs. pressure | ||||
| 3PIx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
| 3PIx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
| Load impedance | kΩ | >10 | >10 | >10 |
| Setpoint relay | ||||
| Number of setpoints | 2 | 2 | 2 | |
| Range (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| Relay contact | n.o., potential free | n.o., potential free | n.o., potential free | |
| Hysteresis | % of threshold | 10 | 10 | 10 |
| Contact rating solid state relays | V (dc) | ≤30 | ≤30 | ≤30 |
| Contact rating mechanical relays | V (dc) | ≤30 | ≤30 | ≤30 |
| Switching time | ms | ≤30 | ≤30 | ≤30 |
| Interface (digital) | RS232C | RS232C | RS232C | |
| Electrical connection | ||||
| 3PIx-0xx-x0xx | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin | |
| 3PIx-0xx-x1xx | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
| 3PIx-0xx-x2xx | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| 3PIx-0xx-x4xx | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | |
| Cable length | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
| RS232C operation | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
| Materials exposed to vacuum | W, Ni, NiFe, glass, SnAg, stainless steel | Ni, NiFe, glass, SnAg, stainless steel | Al2O3, stainless steel | |
| Internal volume | ||||
| DN 16 ISO-KF | cm³ | 4.7 | 4.7 | 4.7 |
| DN 16 ISO-KF long tube | cm³ | 14.5 | 14.5 | 14.5 |
| DN 16 CF-F | cm³ | 8 | 8 | 8 |
| DN 16 CF-R long tube | cm³ | 14 | 14 | 14 |
| DN 25 ISO-KF, 4 VCR | cm³ | 5.5 | 5.5 | 5.5 |
| 8 VCR | cm³ | 7 | 7 | 7 |
| 1/8” NPT, 7/16-20 UNF | cm³ | 5.2 | 5.2 | 5.2 |
| Surface mount 29 mm/1.15 inch | cm³ | 4.9 | 4.9 | 4.9 |
| 4 VCR 90° | cm³ | 7.9 | 7.9 | 7.9 |
| Weight | ||||
| Without fieldbus interface | g | 115 … 130 | 115 … 130 | 115 … 130 |
| With fieldbus interface | g | 230 … 250 | 230 … 250 | 230 … 250 |
| Degree of protection | IP 40 | IP 40 | IP 40 | |
| Standards | ||||
| CE conformity | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | |
| ETL certification | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | |
| DeviceNet™ | ||||
| Protocol | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
| Data rate switch | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
| Cable length 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| Cable length 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| Cable length 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | 2 switches (address 00 – 63) or network programmable | 2 switches (address 00 – 63) or network programmable | 2 switches (address 00 – 63) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Specification | DeviceNet™ “Vacuum Gauge Device Profile” | DeviceNet™ “Vacuum Gauge Device Profile” | DeviceNet™ “Vacuum Gauge Device Profile” | |
| Device type | ”CG” for combination gauge | ”CG” for combination gauge | ”CG” for combination gauge | |
| I / O slave messaging | polling only | polling only | polling only | |
| Supply voltage for DeviceNet™ 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| Power consuption 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
| Connector for DeviceNet | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | |
| Profibus DP | ||||
| Baud rates | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address | 2 switches (address 00 – 127) or network programmable | 2 switches (address 00 – 127) or network programmable | 2 switches (address 00 – 127) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Connector for Profibus DP | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female | |
| RS485C | ||||
| Baud rates | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
| Address | 2 switches (address 00 – 255) | 2 switches (address 00 – 255) | 2 switches (address 00 – 255) | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Connector for RS485 | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| EtherCAT | ||||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
Accessories
| PSG550 Tungsten | |
|---|---|
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
| PSG552 Nickel | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
| PSG554 ceramic coated | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
Spare Parts
| PSG550 Tungsten | |
|---|---|
| Part Number | Description |
| 355-925 | PSG550 Spare sensor, DN 16 ISO-KF |
| 355-926 | PSG550 Spare sensor, DN16 ISO-KF, long |
| 355-927 | PSG550 Spare sensor, DN 16 CF-F |
| 355-928 | PSG550 Spare sensor, DN 16 CF-R, long |
| 355-929 | PSG550 Spare sensor, DN 25 ISO-KF |
| 355-930 | PSG550 Spare sensor, 1/8″ NPT |
| 355-931 | PSG550 Spare sensor, 8-VCR |
| 355-932 | PSG550 Spare sensor, 4-VCR |
| 355-933 | PSG550 Spare sensor, 7/16-20 UNF |
| 355-934 | PSG550 Spare sensor, 29x29mm |
| 355-935 | PSG550 Spare sensor, 4-VCR / 90° |
| PSG552 Nickel | |
| Part Number | Description |
| 355-936 | PSG552 Spare sensor, DN 16 ISO-KF |
| 355-937 | PSG552 Spare sensor, DN16 ISO-KF, long |
| 355-938 | PSG552 Spare sensor, DN 16 CF-F |
| 355-939 | PSG552 Spare sensor, DN 16 CF-R, long |
| 355-940 | PSG552 Spare sensor, DN 25 ISO-KF |
| 355-941 | PSG552 Spare sensor, 1/8″ NPT |
| 355-942 | PSG552 Spare sensor, 8-VCR |
| 355-943 | PSG552 Spare sensor, 4-VCR |
| 355-944 | PSG552 Spare sensor, 7/16-20 UNF |
| 355-945 | PSG552 Spare sensor, 29 x 29mm |
| 355-946 | PSG552 Spare sensor, 4-VCR / 90° |
| PSG554 ceramic coated | |
| Part Number | Description |
| 355-947 | PSG554 Spare sensor, DN 16 ISO-KF |
| 355-948 | PSG554 Spare sensor, DN 16 ISO-KF, long |
| 355-949 | PSG554 Spare sensor, DN 16 CF-F |
| 355-950 | PSG554 Spare sensor, DN 16 CF-R, long |
| 355-951 | PSG554 Spare sensor, DN 25 ISO-KF |
| 355-952 | PSG554 Spare sensor, 1/8″ NPT |
| 355-953 | PSG554 Spare sensor, 8-VCR |
| 355-954 | PSG554 Spare sensor, 4-VCR |
| 355-955 | PSG554 Spare sensor, 7/16-20 UNF |
| 355-956 | PSG554 Spare sensor, 29x29mm |
| 355-957 | PSG554 Spare sensor, 4-VCR / 90° |