EtherCAT Vacuum Instrumentation

INFICON is the first vacuum gauge supplier providing EtherCAT interfaces for its vacuum gauge line covering the whole vacuum pressure range with one of its products. EtherCAT is available on their heated Capacitance Diaphragm, Pirani and Pirani Capacitance Diaphragm vacuum gauges. The EtherCAT interface allows quick, easy system integration of INFICON vacuum gauges and a cost-effective alternative to gauges with traditional fieldbus interfaces.

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  BAG402

  Bayard Alpert Gauges
  
  
  
  
  
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  CDG025D2

  Edge Capacitance Diaphragm Gauges
  
  
  
  
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  CDG100D

  Capacitance Diaphragm Gauge
  
  
  
  
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  BPG402

  Bayard Aplert
  Pirani Gauge
  
  
  
  
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  CDG160D

  High Temperature
  Capacitance
  Diaphragm Gauge
  
  
  
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  CDG200D

  High Tenperature
  Capacitance
  Diaphragm Gauge
  
  
  
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  BCG450

  Bayard Alpert
  Pirani Capacitance
  Diaphragm Gauge
  
  
  
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  CDG045D2

  Edge Capacitance Diaphragm Gauges
  
  
  
  
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  CDG100D2

  Edge Capacitance Diaphragm Gauges
  
  
  
  
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  CDG045Dhs

  High-Speed Capacitance Diaphragm Gauge
  
  
  
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  CDG100Dhs

  High-Speed Capacitance Diaphragm Gauge
  
  
  
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  PSG55x

  Pirani Standard
  Gauge Advanced
  Series
  
  
  
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  PCG55x

  Pirani Capacitance
  Diaphragm Gauge