PCG55x
ATM to Medium Vacuum Gauge
The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product.
In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.
Benefits
- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical Applications
- Load Lock control
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control in the medium and rough vacuum range
Part Number
Dimensions
Specifications
| Type | PCG550 Tungsten | PCG552 Nickel | PCG554 ceramic coated | |
|---|---|---|---|---|
| Measurement range | mbar | 5×10-5 … 1500 | 5×10-5 … 1500 | 5×10-5 … 1500 |
| Accuracy | ||||
| 5×10-4 … 1×10-3 mbar (N2) | % of reading | ±50 | ±50 | ±50 |
| 1×10-3 … 100 mbar (N2) | % of reading | ±15 | ±15 | ±15 |
| 100 … 950 mbar | % of reading | ±5 | ±5 | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 | ±2.5 | ±2.5 |
| Repeatability | ||||
| 1×10-3 … 1100 mbar (N2) | % of reading | ±2 | ±2 | ±2 |
| Admissible pressure | bar (absolute) | ≤5 | ≤5 | ≤5 |
| Pressure, max. | bar (absolute) | ≥10 | ≥10 | ≥10 |
| Admissible temperature | ||||
| Operation (ambient) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| Storage | °C | -20 … +65 | -20 … +65 | -20 … +65 |
| Bakeout at flange | °C | ≤80 | ≤80 | ≤80 |
| Bakeout at flange long tube | °C | ≤250 | ≤250 | ≤250 |
| Supply voltage | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| Power consumption | ||||
| Without fieldbus | W | ≤2.5 | ≤2.5 | ≤2.5 |
| DeviceNet™ | W | ≤3 | ≤3 | ≤3 |
| Profibus | W | ≤3 | ≤3 | ≤3 |
| Output signal analog 3PCx-0xx-xxx0 | V | 0 … +10.23 | 0 … +10.23 | 0 … +10.23 |
| Output signal analog 3PCx-0xx-xxx1 | V | 0 … +8.68 | 0 … +8.68 | 0 … +8.68 |
| Output signal analog 3PCx-0xx-xxx2 | V | 0 … +5.659 | 0 … +5.659 | 0 … +5.659 |
| Output signal analog 3PCx-0xx-xxx3 | V | 0 … +9.05 | 0 … +9.05 | 0 … +9.05 |
| Measuring range 3PCx-0xx-xxx0 | V | +0.61 … +10.23 | +0.61 … +10.23 | +0.61 … +10.23 |
| Measuring range 3PCx-0xx-xxx1 | V | +1.2 … +8.68 | +1.2 … +8.68 | +1.2 … +8.68 |
| Measuring range 3PCx-0xx-xxx2 | V | +0.375 … +5.659 | +0.375 … +5.659 | +0.375 … +5.659 |
| Measuring range 3PCx-0xx-xxx3 | V | +1.57 … +9.05 | +1.57 … +9.05 | +1.57 … +9.05 |
| Voltage vs. pressure | ||||
| 3PCx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
| 3PCx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
| Load impedance | kΩ | >10 | >10 | >10 |
| Setpoint relay | ||||
| Number of setpoints | 2 | 2 | 2 | |
| Range (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| Relay contact | n.o., potential free | n.o., potential free | n.o., potential free | |
| Hysteresis | % of threshold | 10 | 10 | 10 |
| Contact rating solid state relays | V (dc) | ≤30 | ≤30 | ≤30 |
| Contact rating mechanical relays | V (dc) | ≤30 | ≤30 | ≤30 |
| Switching time | ms | ≤30 | ≤30 | ≤30 |
| Interface (digital) | RS232C | RS232C | RS232C | |
| Electrical connection | ||||
| 3PCx-0xx-x0xx | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin | |
| 3PCx-0xx-x1xx | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
| 3PCx-0xx-x2xx | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| 3PCx-0xx-x4xx | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | |
| Cable length | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
| RS232C operation | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
| Materials exposed to vacuum | W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Al2O3, stainless steel | |
| Internal volume | ||||
| DN 16 ISO-KF | cm³ | 4.7 | 4.7 | 4.7 |
| DN 16 ISO-KF long tube | cm³ | 14.5 | 14.5 | 14.5 |
| DN 16 CF-F | cm³ | 8 | 8 | 8 |
| DN 16 CF-R long tube | cm³ | 14 | 14 | 14 |
| DN 25 ISO-KF, 4 VCR | cm³ | 5.5 | 5.5 | 5.5 |
| 8 VCR | cm³ | 7 | 7 | 7 |
| 1/8” NPT, 7/16-20 UNF | cm³ | 5.2 | 5.2 | 5.2 |
| Surface mount 29 mm/1.15 inch | cm³ | 4.9 | 4.9 | 4.9 |
| 4 VCR 90° | cm³ | 7.9 | 7.9 | 7.9 |
| Weight | ||||
| Without fieldbus interface | g | 115 … 130 | 115 … 130 | 115 … 130 |
| With fieldbus interface | g | 230 … 250 | 230 … 250 | 230 … 250 |
| Degree of protection | IP 40 | IP 40 | IP 40 | |
| Standards | ||||
| CE conformity | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | |
| ETL certification | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | |
| DeviceNet™ | ||||
| Protocol | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
| Data rate switch | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
| Cable length 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| Cable length 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| Cable length 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | 2 switches (address 00 – 63) or network programmable | 2 switches (address 00 – 63) or network programmable | 2 switches (address 00 – 63) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Specification | DeviceNet™ “Vacuum Gauge Device Profile” | DeviceNet™ “Vacuum Gauge Device Profile” | DeviceNet™ “Vacuum Gauge Device Profile” | |
| Device type | ”CG” for combination gauge | ”CG” for combination gauge | ”CG” for combination gauge | |
| I / O slave messaging | polling only | polling only | polling only | |
| Supply voltage for DeviceNet™ 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| Power consuption 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
| Connector for DeviceNet | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | |
| Profibus DP | ||||
| Baud rates | kBaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address | 2 switches (address 00 – 127) or network programmable | 2 switches (address 00 – 127) or network programmable | 2 switches (address 00 – 127) or network programmable | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Connector for Profibus DP | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female | |
| RS485C | ||||
| Baud rates | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
| Address | 2 switches (address 00 – 255) | 2 switches (address 00 – 255) | 2 switches (address 00 – 255) | |
| Digital functions | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Connector for RS485 | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| EtherCAT | ||||
| Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| Communication standards | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | ETG.5003 Part 1 “Semiconductor Device Profile” ETG.5003 Part 2080 “Specific Device Profile: Vacuum Pressure Gauge” | |
| Node address | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| Cable length | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
Accessories
| PCG550 Tungsten | |
|---|---|
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
| PCG552 Nickel | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
| PCG554 ceramic coated | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-097 | Centering ring with fine filter DN 16 KF |
| 303-333 | Diagnostic cable 1.9m (P3) |
Spare Parts
| PCG550 Tungsten | |
|---|---|
| Part Number | Description |
| 357-925 | PCG550 Spare Sensor, DN16ISO-KF |
| 357-926 | PCG550 Spare Sensor, DN16ISO-KF, long |
| 357-927 | PCG550 Spare Sensor, DN16CF-F |
| 357-928 | PCG550 Spare Sensor, DN16CF-R, long |
| 357-929 | PCG550 Spare Sensor, DN25ISO-KF |
| 357-930 | PCG550 Spare Sensor, 1/8″ NPT |
| 357-931 | PCG550 Spare Sensor, 8-VCR |
| 357-932 | PCG550 Spare Sensor, 4-VCR |
| 357-933 | PCG550 Spare Sensor, 7/16-20 UNF |
| 357-934 | PCG550 Spare Sensor, 29x29mm |
| 357-935 | PCG550 Spare Sensor, 4-VCR / 90° |
| PCG552 Nickel | |
| Part Number | Description |
| 357-936 | PCG552 Spare Sensor, DN16ISO-KF |
| 357-937 | PCG552 Spare Sensor, DN16ISO-KF, long |
| 357-938 | PCG552 Spare Sensor, DN16CF-F |
| 357-939 | PCG552 Spare Sensor, DN16CF-R, long |
| 357-941 | PCG552 Spare Sensor, 1/8″ NPT |
| 357-942 | PCG552 Spare Sensor, 8-VCR |
| 357-943 | PCG552 Spare Sensor, 4-VCR |
| 357-944 | PCG552 Spare Sensor, 7/16-20 UNF |
| 357-945 | PCG552 Spare Sensor, 29x29mm |
| 357-946 | PCG552 Spare Sensor, 4-VCR / 90° |
| PCG554 ceramic coated | |
| Part Number | Description |
| 357-947 | PCG554 Spare Sensor, DN16ISO-KF |
| 357-948 | PCG554 Spare Sensor, DN16ISO-KF, long |
| 357-949 | PCG554 Spare Sensor, DN16CF-F |
| 357-950 | PCG554 Spare Sensor, DN16CF-R, long |
| 357-951 | PCG554 Spare Sensor, DN25ISO-KF |
| 357-952 | PCG554 Spare Sensor, 1/8″ NPT |
| 357-953 | PCG554 Spare Sensor, 8-VCR |
| 357-954 | PCG554 Spare Sensor, 4-VCR |
| 357-955 | PCG554 Spare Sensor, 7/16-20 UNF |
| 357-956 | PCG554 Spare Sensor, 29x29mm |
| 357-957 | PCG554 Spare Sensor, 4-VCR / 90° |