your best partner for vacuum

UL3000 FAB

Mobile Helium Leak Detector (Dry)

and UL3000 Fab Mobile Helium Leak DetectorULTRATEST ™ sensor  technology

Specifically designed for the needs of leak checking in semiconductor applications.

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

OUTSTANDING ADVANTAGES FOR THE UL3000 FAB ULTRA MODEL

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • The UL3000 Fab ULTRA offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
  • Both models featureFAST RESULTSThe improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.ROTATABLE DISPLAY AND REMOTE CONTROLLABLE USER INTERFACEThe new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet – without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

    SLIM DESIGN FOR ADVANCED MANEUVERABILITY

    A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.

Features

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

Typical Applications

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

Part Number

Part Number Description
550-260 UL3000 Fab ULTRA
550-200 Leak detector UL3000 Fab

Specifications

Type UL3000 Fab / UL3000 Fab ULTRA
Min. detectable leak rate for helium (vacuum method) mbar•L/s < 5 x 10-12
Min. detectable leak rate for helium (sniffer mode) mbar•L/s < 5 x 10-8
Max. Inlet pressure (MASSIVE mode) mbar atm (~1013)
Roughing Pump Type scroll                           roots
Max. pumping speed of roughing pump m³/h >30                          >36
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Response time s <1
Time until ready for operation min <3
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H23He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interfaces 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Max. Power consumption VA 1500
Dimensions (LxWxH) in. 42x21x34
Weight kg 118                           132
Permissable ambient temperature range (during operation) °C 10 to 40
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

Accessories

UL3000 Fab / UL3000 Fab ULTRA
Part Number Description
551-010 Remote Control RC1000C, with 4m cable
551-202 Vaccuum Hose Holder for UL3000 Fab
525-001 SL3000-3,sniffer line 3m length
525-002 SL3000-5,sniffer line 5m length
525-003 SL3000-10, sniffer line 10m length
551-203 Bracket for SL3000
551-210 SL200, Sniffer line + ext. for UL3000
551-201 Helium Bottle Holder for UL3000/6000 Fab
560-310 I/O 1000 module
560-315 BM1000 Profibus module
560-316 BM1000 PROFINET IO
560-317 BM1000 DeviceNet
560-318 BM1000 EtherNet/IP(TM)
560-334 Data Cable for IO1000,BM1000, 0.5m
560-332 Data cable 2 m LDS3000
560-335 Data Cable 5 m
560-340 Data Cable 10 m
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-205 extension cable for TC1000/SL200, UL3000

Consumables

UL3000 Fab / UL3000 Fab ULTRA
Part Number Description
200007656 Airfilter Kit UL3 Housing Ventilation
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